A calibration setup for a new type of nano probe

E.J.C. Bos; H. Haitjema; P.H.J. Schellekens; I. Widdershoven

A calibration setup for a new type of nano probe

E.J.C. Bos, H. Haitjema, P.H.J. Schellekens, I. Widdershoven

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

A probe has been designed using piezo-resistive strain gauges to measure the bending of three slender rods etched in silicon. This nano-probe is calibrated on a 1D setup using a differential plane mirror interferometer. The calibration setup has less than 5 nm uncertainty, 1 nm resolution and a range of 30 µm. Periodic non-linearities of the laser interferometer are determined and will be compensated by RF-phase-sensitive detection of the interferometer signal. The uncertainty of the probe after calibration is less than 10 nm for vertical probing. For other probing directions, effects due to friction and rolling of the spherical probe tip affect the probe uncertainty.

Original language	English
Title of host publication	Micro system technologies 2003 : international conference and exhibition on micro electro, opto, mechanical systems and components, Muenchen, October 7-8, 2003
Editors	H. Reichl
Place of Publication	Germany, Munich
Publisher	Franzis
Pages	8-
ISBN (Print)	3-7723-7020-9
Publication status	Published - 2003

Cite this

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title = "A calibration setup for a new type of nano probe",

abstract = "A probe has been designed using piezo-resistive strain gauges to measure the bending of three slender rods etched in silicon. This nano-probe is calibrated on a 1D setup using a differential plane mirror interferometer. The calibration setup has less than 5 nm uncertainty, 1 nm resolution and a range of 30 µm. Periodic non-linearities of the laser interferometer are determined and will be compensated by RF-phase-sensitive detection of the interferometer signal. The uncertainty of the probe after calibration is less than 10 nm for vertical probing. For other probing directions, effects due to friction and rolling of the spherical probe tip affect the probe uncertainty.",

author = "E.J.C. Bos and H. Haitjema and P.H.J. Schellekens and I. Widdershoven",

year = "2003",

language = "English",

isbn = "3-7723-7020-9",

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A calibration setup for a new type of nano probe. / Bos, E.J.C.; Haitjema, H.; Schellekens, P.H.J. et al.

Micro system technologies 2003 : international conference and exhibition on micro electro, opto, mechanical systems and components, Muenchen, October 7-8, 2003. ed. / H. Reichl. Germany, Munich : Franzis, 2003. p. 8-.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - A calibration setup for a new type of nano probe

AU - Bos, E.J.C.

AU - Haitjema, H.

AU - Schellekens, P.H.J.

AU - Widdershoven, I.

PY - 2003

Y1 - 2003

N2 - A probe has been designed using piezo-resistive strain gauges to measure the bending of three slender rods etched in silicon. This nano-probe is calibrated on a 1D setup using a differential plane mirror interferometer. The calibration setup has less than 5 nm uncertainty, 1 nm resolution and a range of 30 µm. Periodic non-linearities of the laser interferometer are determined and will be compensated by RF-phase-sensitive detection of the interferometer signal. The uncertainty of the probe after calibration is less than 10 nm for vertical probing. For other probing directions, effects due to friction and rolling of the spherical probe tip affect the probe uncertainty.

AB - A probe has been designed using piezo-resistive strain gauges to measure the bending of three slender rods etched in silicon. This nano-probe is calibrated on a 1D setup using a differential plane mirror interferometer. The calibration setup has less than 5 nm uncertainty, 1 nm resolution and a range of 30 µm. Periodic non-linearities of the laser interferometer are determined and will be compensated by RF-phase-sensitive detection of the interferometer signal. The uncertainty of the probe after calibration is less than 10 nm for vertical probing. For other probing directions, effects due to friction and rolling of the spherical probe tip affect the probe uncertainty.

M3 - Conference contribution

SN - 3-7723-7020-9

SP - 8-

BT - Micro system technologies 2003 : international conference and exhibition on micro electro, opto, mechanical systems and components, Muenchen, October 7-8, 2003

A2 - Reichl, H.

PB - Franzis

CY - Germany, Munich

ER -

A calibration setup for a new type of nano probe

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