A calibration setup for a new type of nano probe

E.J.C. Bos, H. Haitjema, P.H.J. Schellekens, I. Widdershoven

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Abstract

A probe has been designed using piezo-resistive strain gauges to measure the bending of three slender rods etched in silicon. This nano-probe is calibrated on a 1D setup using a differential plane mirror interferometer. The calibration setup has less than 5 nm uncertainty, 1 nm resolution and a range of 30 µm. Periodic non-linearities of the laser interferometer are determined and will be compensated by RF-phase-sensitive detection of the interferometer signal. The uncertainty of the probe after calibration is less than 10 nm for vertical probing. For other probing directions, effects due to friction and rolling of the spherical probe tip affect the probe uncertainty.
Original languageEnglish
Title of host publicationMicro system technologies 2003 : international conference and exhibition on micro electro, opto, mechanical systems and components, Muenchen, October 7-8, 2003
EditorsH. Reichl
Place of PublicationGermany, Munich
PublisherFranzis
Pages8-
ISBN (Print)3-7723-7020-9
Publication statusPublished - 2003

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