| Original language | English |
|---|---|
| Title of host publication | 9th International Precision Engineering Conference, Braunschweig |
| Publication status | Published - 1997 |
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A calibration platform for generating parallel displacements with nanometre accuracy
- H. Haitjema
- , P.C.J.N. Rosielle
- , H.A.M. Steijaert
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review