A calibration platform for generating parallel displacements with nanometre accuracy

H. Haitjema, P.C.J.N. Rosielle, H.A.M. Steijaert

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publication9th International Precision Engineering Conference, Braunschweig
Publication statusPublished - 1997

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