@inproceedings{df15a09dbcef40ea8d6a62e6ac01cd1e,
title = "A Bending-type Actuator Based on Single-Crystal Piezoelectric Plates for Use in an Actuated Wafer Table",
author = "S.J. Hermanussen and J.P.M.B. Vermeulen and M.F. Heertjes and M.B.I. Habets",
year = "2024",
language = "English",
pages = "1--5",
booktitle = "Proceedings - ASPE 2024 Annual Meeting",
publisher = "American Society of Precision Engineering (ASPE)",
note = "39th Annual Meeting of the American Society for Precision Engineering, ASPE 2024 ; Conference date: 05-11-2024 Through 08-11-2024",
}