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  • W.M.M. (Erwin) Kessels
2020

ALD – a truly enabling nanotechnology: And how the Netherlands contributed to its wide spread application

Kessels, W. M. M., 2 Jun 2020, In : Nevac Blad. 58, special, p. 6-9 2.

Research output: Contribution to journalArticlePopular

Area-Selective Atomic Layer Deposition of Two-Dimensional WS2 Nanolayers

Balasubramanyam, S., Merkx, M. J. M., Verheijen, M. A., Kessels, W. M. M., Mackus, A. J. M. & Bol, A. A., 4 May 2020, In : ACS Materials Letters. 2, 5, p. 511-518 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
1 Citation (Scopus)

Atomic Layer Deposition of Al doped MoS2: Synthesizing a p-type 2D semiconductor with tunable carrier density

Vandalon, V., Verheijen, M. A., Kessels, W. M. M. & Bol, A. A., 25 Sep 2020, (Accepted/In press) In : ACS Applied Nano Materials. 13 p.

Research output: Contribution to journalArticleAcademicpeer-review

Atomic layer deposition of aluminum phosphate using AlMe3, PO(OMe)3 and O2 plasma: film growth and surface reactions

Hornsveld, N., Kessels, W. M. M. E. & Creatore, M. A., 5 Mar 2020, In : Journal of Physical Chemistry C. 124, 9, p. 5495-5505 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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24 Downloads (Pure)
1 Downloads (Pure)
1 Citation (Scopus)

Atomic layer deposition of ruthenium using an ABC-type process: Role of oxygen exposure during nucleation

Chopra, S. N., Vos, M. F. J., Verheijen, E., Ekerdt, J. G., Kessels, W. M. M. & Mackus, A. J. M., 18 Sep 2020, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 38, 6, 9 p., 062402.

Research output: Contribution to journalArticleAcademicpeer-review

Effect of an electric field during the deposition of silicon dioxide thin films by plasma enhanced atomic layer deposition: an experimental and computational study

Beladiya, V., Becker, M., Faraz, T., Kessels, W. M. M., Schenk, P., Otto, F., Fritz, T., Gruenewald, M., Helbing, C., Jandt, K. D., Tünnermann, A., Sierka, M. & Szeghalmi, A., 21 Jan 2020, In : Nanoscale. 12, 3, p. 2089-2102 14 p.

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)
1 Downloads (Pure)

Erratum: History of atomic layer deposition and its relationship with the American Vacuum Society (Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films (2013)31 (050818) DOI: 10.1116/1.4816548)

Parsons, G. N., Elam, J. W., George, S. M., Haukka, S., Jeon, H., Kessels, W. M. M., Leskelä, M., Poodt, P., Ritala, M. & Rossnagel, S. M., 1 May 2020, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 38, 3, 1 p., 037001.

Research output: Contribution to journalComment/Letter to the editorAcademicpeer-review

Open Access

Evidence for low-energy ions influencing plasma-assisted atomic layer deposition of SiO2: Impact on the growth per cycle and wet etch rate

Arts, K., Deijkers, J. H., Faraz, T., Puurunen, R. L., Kessels, W. M. M. & Knoops, H. C. M., 20 Jul 2020, In : Applied Physics Letters. 117, 3, 5 p., 031602.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access

Improved Passivation of n-Type Poly-Si Based Passivating Contacts by the Application of Hydrogen-Rich Transparent Conductive Oxides

Tutsch, L., Feldmann, F., Macco, B., Bivour, M., Kessels, W. M. M. E. & Hermle, M., Jul 2020, In : IEEE Journal of Photovoltaics. 10, 4, p. 986-991 6 p., 9093196.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
2 Citations (Scopus)
Open Access
File
62 Downloads (Pure)

Mechanism of precursor blocking by acetylacetone inhibitor molecules during area-selective atomic layer deposition of SiO2

Merkx, M. J. M., Sandoval, T. E., Hausmann, D. M., Kessels, W. M. M. E. & Mackus, A. J. M., 28 Apr 2020, In : Chemistry of Materials. 32, 8, p. 3335-3345

Research output: Contribution to journalArticleAcademicpeer-review

Metastable refractive index manipulation in hydrogenated amorphous silicon for reconfigurable photonics

Mohammed, M. A., Melskens, J., Stabile, R., Pagliano, F., Li, C., Kessels, W. M. M. & Raz, O., 1 Mar 2020, In : Advanced Optical Materials. 8, 6, 11 p., 1901680.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
1 Citation (Scopus)
20 Downloads (Pure)

On the hydrogenation of Poly-Si passivating contacts by Al2O3 and SiNx thin films

van de Loo, B. W. H., Macco, B., Schnabel, M., Stodolny, M. K., Mewe, A. A., Young, D. L., Nemeth, W., Stradins, P. & Kessels, W. M. M., 15 Sep 2020, In : Solar Energy Materials and Solar Cells. 215, 6 p., 110592.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
1 Citation (Scopus)
Open Access
File
2 Citations (Scopus)
8 Downloads (Pure)

Probing the origin and suppression of vertically oriented nanostructures of 2D WS2 layers

Balasubramanyam, S., Bloodgood, M., van Ommeren, M., Faraz, T., Vandalon, V., Kessels, W. M. M. E., Verheijen, M. A. & Bol, A. A., 22 Jan 2020, In : ACS Applied Materials & Interfaces. 12, 3, p. 3873-3885 13 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
1 Citation (Scopus)
26 Downloads (Pure)

Self-aligned local contact opening and n+ diffusion by single-step laser doping from POx/Al2O3 passivation stacks

Black, L. E., Ernst, M., Theeuwes, R. J., Melskens, J., Macdonald, D. & Kessels, W. M. M., 1 Nov 2020, In : Solar Energy Materials and Solar Cells. 217, 7 p., 110717.

Research output: Contribution to journalArticleAcademicpeer-review

2019

Area-selective atomic layer deposition of ZnO by area activation using electron beam-induced deposition

Mameli, A., Karasulu, B., Verheijen, M., Barcones Campo, B., Macco, B., Mackus, A., Kessels, E. & Roozeboom, F., 26 Feb 2019, In : Chemistry of Materials. 31, 4, p. 1250-1257 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
12 Citations (Scopus)
55 Downloads (Pure)

Area-selective deposition of Ruthenium by combining atomic layer deposition and selective etching

Vos, M. F. J., Chopra, S. N., Verheijen, M. A., Ekerdt, J. G., Agarwal, S., Kessels, W. M. M. & Mackus, A. J. M., 22 May 2019, In : Chemistry of Materials. 31, 11, p. 3878-3882 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
10 Citations (Scopus)
128 Downloads (Pure)

Atomic layer deposition of cobalt phosphate thin films for the oxygen evolution reaction

Di Palma, V., Zafeiropoulos, G., Goldsweer, T., Kessels, W. M. M., van de Sanden, M. C. M., Creatore, M. & Tsampas, M. N., 1 Jan 2019, In : Electrochemistry Communications. 98, p. 73-77 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
8 Citations (Scopus)
103 Downloads (Pure)

Chemical analysis of the interface between hybrid organic−inorganic perovskite and atomic layer deposited Al2O3

Koushik, D., Hazendonk, L., Zardetto, V., Vandalon, V., Verheijen, M. A., Kessels, W. M. M. & Creatore, M., 6 Feb 2019, In : ACS Applied Materials & Interfaces. 11, 5, p. 5526-5535 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
8 Citations (Scopus)
158 Downloads (Pure)

Data on dopant characteristics and band alignment of CdTe cells with and without a ZnO highly-resistive-transparent buffer layer

Kartopu, G., Williams, B. L., Zardetto, V., Gürlek, A. K., Clayton, A. J., Jones, S., Kessels, W. M. M., Creatore, M. & Irvine, S. J. C., 1 Feb 2019, In : Data in Brief. 22, p. 218-221 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
39 Downloads (Pure)
Open Access
File
8 Citations (Scopus)
120 Downloads (Pure)
21 Citations (Scopus)
3 Downloads (Pure)

Enhancement of the photocurrent and efficiency of CdTe solar cells suppressing the front contact reflection using a highly-resistive ZnO buffer layer

Kartopu, G., Williams, B. L., Zardetto, V., Gürlek, A. K., Clayton, A. J., Jones, S., Kessels, W. M. M., Creatore, M. & Irvine, S. J. C., Mar 2019, In : Solar Energy Materials and Solar Cells. 191, p. 78-82 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
18 Citations (Scopus)
47 Downloads (Pure)

Film conformality and extracted recombination probabilities of O atoms during plasma-assisted atomic layer deposition of SiO2, TiO2, Al2O3, and HfO2

Arts, K., Utriainen, M., Puurunen, R. L., Kessels, E. & Knoops, H., 7 Nov 2019, In : Journal of Physical Chemistry C. 123, 44, p. 27030-27035 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
6 Citations (Scopus)
31 Downloads (Pure)

From the bottom-up: toward area-selective atomic layer deposition with high selectivity

Mackus, A. J. M., Merkx, M. J. M. & Kessels, W. M. M., 8 Jan 2019, In : Chemistry of Materials. 31, 1, p. 2-12 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
38 Citations (Scopus)
357 Downloads (Pure)

Infrared and optical emission spectroscopy study of atmospheric pressure plasma-enhanced spatial ALD of Al2O3

Mione, M., Engeln, R., Vandalon, V., Kessels, E. & Roozeboom, F., 19 Aug 2019, In : Applied Physics Letters. 115, 8, 5 p., 083101.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
1 Downloads (Pure)

Initial growth study of atomic-layer deposition of Al2O3 by vibrational sum-frequency generation

Vandalon, V. & Kessels, E., 13 Aug 2019, In : Langmuir. 35, 32, p. 10374-10382 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
1 Citation (Scopus)
22 Downloads (Pure)
Open Access
File
50 Downloads (Pure)
Open Access
File
93 Downloads (Pure)

Mass spectrometry study of Li2CO3 film growth by thermal and plasma-assisted atomic layer deposition

Hornsveld, N., Kessels, E. & Creatore, A., 21 Feb 2019, In : Journal of Physical Chemistry C. 123, 7, p. 4109-4115 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
1 Citation (Scopus)
6 Downloads (Pure)

On the effect of atomic layer deposited Al2O3 on the environmental degradation of hybrid perovskite probed by positron annihilation spectroscopy

Koushik, D., Naziris, F., Melskens, J., Nusteling, A., Zardetto, V., Schut, H., Kessels, W. M. M., Eijt, S. W. H. & Creatore, M., 14 May 2019, In : Journal of Materials Chemistry C. 7, 18, p. 5275-5284 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)
1 Downloads (Pure)

On the role of micro-porosity in affecting the environmental stability of atomic/molecular layer deposited (ZnO) : A (Zn-O-C 6 H 4 -O) b films

Aghaee, M., Niemelä, J. P., Kessels, W. M. M. & Creatore, M., 14 Feb 2019, In : Dalton Transactions. 48, 10, p. 3496-3505 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

8 Citations (Scopus)
1 Downloads (Pure)

Performance and thermal stability of an a-Si:H/TiOx/Yb stack as an electron-selective contact in silicon heterojunction solar cells

Cho, J., Melskens, J., Payo, M. R., Debucquoy, M., Radhakrishnan, H. S., Gordon, I., Szlufcik, J., Kessels, W. M. M. & Poortmans, J., 25 Feb 2019, In : ACS Applied Energy Materials. 2, 2, p. 1393-1404 12 p.

Research output: Contribution to journalArticleAcademicpeer-review

8 Citations (Scopus)

Photovoltaic cell and a method for manufacturing the same

Kessels, E. & Black, L., 12 Sep 2019, Patent No. WO2019172770, Priority date 9 Mar 2018, Priority No. NL20182020560 20180309

Research output: PatentPatent publication

Open Access
File
9 Downloads (Pure)

Plasma-assisted ALD of LiPO(N) for solid state batteries

Put, B., Mees, M. J., Hornsveld, N., Hollevoet, S., Sepúlveda, A., Vereecken, P. M., Kessels, W. M. M. & Creatore, M., 12 Apr 2019, In : Journal of the Electrochemical Society. 166, 6, p. A1239-A1242 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

5 Citations (Scopus)
3 Downloads (Pure)

Plasma-assisted atomic layer deposition of nickel oxide as hole transport layer for hybrid perovskite solar cells

Koushik, D., Jošt, M., Dučinskas, A., Burgess, C., Zardetto, V., Weijtens, C., Verheijen, M., Kessels, E., Albrecht, S. & Creatore, A., 17 Sep 2019, In : Journal of Materials Chemistry C. 7, 40, p. 12532-12543 12 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
4 Citations (Scopus)
56 Downloads (Pure)

Rear-emitter silicon heterojunction solar cells with atomic layer deposited ZnO:Al serving as an alternative transparent conducting oxide to In2O3:Sn

Niemelä, J., Macco, B., Barraud, L., Descoeudres, A., Badel, N., Despeisse, M., Christmann, G., Nicolay, S., Ballif, C., Kessels, E. & Creatore, A., 15 Sep 2019, In : Solar Energy Materials and Solar Cells. 200, 109953, 5 p., 109953.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
8 Citations (Scopus)
42 Downloads (Pure)

Silicon surface passivation by transparent conductive zinc oxide

van de Loo, B. W. H., Macco, B., Melskens, J., Beyer, W. & Kessels, E., 14 Mar 2019, In : Journal of Applied Physics. 125, 10, 9 p., 105305.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
5 Citations (Scopus)
27 Downloads (Pure)

Status and prospects of plasma-assisted atomic layer deposition

Knoops, H., Faraz, T., Arts, K. & Kessels, E., 1 May 2019, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 37, 3, 26 p., 030902.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
26 Citations (Scopus)
325 Downloads (Pure)

Sticking probabilities of H2O and Al(CH3)3 during atomic layer deposition of Al2O3 extracted from their impact on film conformality

Arts, K., Vandalon, V., Puurunen, R. L., Utriainen, M., Gao, F., Kessels, E. & Knoops, H., 24 Apr 2019, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 37, 3, 5 p., 030908.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
6 Citations (Scopus)
5 Downloads (Pure)

TiO2 thin film patterns prepared by chemical vapor deposition and atomic layer deposition using an atmospheric pressure microplasma printer

Aghaee, M., Verheijen, J., Stevens, A. A. E., Kessels, E. & Creatore, A., Dec 2019, In : Plasma Processes and Polymers. 16, 12, 14 p., 1900127.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
3 Citations (Scopus)
32 Downloads (Pure)

Transition in layer structure of atomic/molecular layer deposited ZnO-zincone multilayers

Niemelä, J., Aghaee, M., Kessels, E., Creatore, A. & Verheijen, M., 1 Jul 2019, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 37, 4, 4 p., 040602.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
1 Citation (Scopus)
4 Downloads (Pure)