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  • W.M.M. (Erwin) Kessels
2019

Area-selective atomic layer deposition of ZnO by area activation using electron beam-induced deposition

Mameli, A., Karasulu, B., Verheijen, M., Barcones Campo, B., Macco, B., Mackus, A., Kessels, E. & Roozeboom, F., 26 Feb 2019, In : Chemistry of Materials. 31, 4, p. 1250-1257 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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12 Citations (Scopus)
59 Downloads (Pure)

Area-selective deposition of Ruthenium by combining atomic layer deposition and selective etching

Vos, M. F. J., Chopra, S. N., Verheijen, M. A., Ekerdt, J. G., Agarwal, S., Kessels, W. M. M. & Mackus, A. J. M., 22 May 2019, In : Chemistry of Materials. 31, 11, p. 3878-3882 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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10 Citations (Scopus)
133 Downloads (Pure)

Atomic layer deposition of cobalt phosphate thin films for the oxygen evolution reaction

Di Palma, V., Zafeiropoulos, G., Goldsweer, T., Kessels, W. M. M., van de Sanden, M. C. M., Creatore, M. & Tsampas, M. N., 1 Jan 2019, In : Electrochemistry Communications. 98, p. 73-77 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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8 Citations (Scopus)
109 Downloads (Pure)

Chemical analysis of the interface between hybrid organic−inorganic perovskite and atomic layer deposited Al2O3

Koushik, D., Hazendonk, L., Zardetto, V., Vandalon, V., Verheijen, M. A., Kessels, W. M. M. & Creatore, M., 6 Feb 2019, In : ACS Applied Materials & Interfaces. 11, 5, p. 5526-5535 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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8 Citations (Scopus)
159 Downloads (Pure)

Data on dopant characteristics and band alignment of CdTe cells with and without a ZnO highly-resistive-transparent buffer layer

Kartopu, G., Williams, B. L., Zardetto, V., Gürlek, A. K., Clayton, A. J., Jones, S., Kessels, W. M. M., Creatore, M. & Irvine, S. J. C., 1 Feb 2019, In : Data in Brief. 22, p. 218-221 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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39 Downloads (Pure)
Open Access
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9 Citations (Scopus)
125 Downloads (Pure)
21 Citations (Scopus)
3 Downloads (Pure)

Enhancement of the photocurrent and efficiency of CdTe solar cells suppressing the front contact reflection using a highly-resistive ZnO buffer layer

Kartopu, G., Williams, B. L., Zardetto, V., Gürlek, A. K., Clayton, A. J., Jones, S., Kessels, W. M. M., Creatore, M. & Irvine, S. J. C., Mar 2019, In : Solar Energy Materials and Solar Cells. 191, p. 78-82 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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18 Citations (Scopus)
48 Downloads (Pure)

Film conformality and extracted recombination probabilities of O atoms during plasma-assisted atomic layer deposition of SiO2, TiO2, Al2O3, and HfO2

Arts, K., Utriainen, M., Puurunen, R. L., Kessels, E. & Knoops, H., 7 Nov 2019, In : Journal of Physical Chemistry C. 123, 44, p. 27030-27035 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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6 Citations (Scopus)
32 Downloads (Pure)

From the bottom-up: toward area-selective atomic layer deposition with high selectivity

Mackus, A. J. M., Merkx, M. J. M. & Kessels, W. M. M., 8 Jan 2019, In : Chemistry of Materials. 31, 1, p. 2-12 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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39 Citations (Scopus)
369 Downloads (Pure)

Infrared and optical emission spectroscopy study of atmospheric pressure plasma-enhanced spatial ALD of Al2O3

Mione, M., Engeln, R., Vandalon, V., Kessels, E. & Roozeboom, F., 19 Aug 2019, In : Applied Physics Letters. 115, 8, 5 p., 083101.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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4 Downloads (Pure)

Initial growth study of atomic-layer deposition of Al2O3 by vibrational sum-frequency generation

Vandalon, V. & Kessels, E., 13 Aug 2019, In : Langmuir. 35, 32, p. 10374-10382 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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1 Citation (Scopus)
24 Downloads (Pure)
Open Access
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50 Downloads (Pure)
Open Access
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101 Downloads (Pure)

Mass spectrometry study of Li2CO3 film growth by thermal and plasma-assisted atomic layer deposition

Hornsveld, N., Kessels, E. & Creatore, A., 21 Feb 2019, In : Journal of Physical Chemistry C. 123, 7, p. 4109-4115 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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1 Citation (Scopus)
6 Downloads (Pure)

On the effect of atomic layer deposited Al2O3 on the environmental degradation of hybrid perovskite probed by positron annihilation spectroscopy

Koushik, D., Naziris, F., Melskens, J., Nusteling, A., Zardetto, V., Schut, H., Kessels, W. M. M., Eijt, S. W. H. & Creatore, M., 14 May 2019, In : Journal of Materials Chemistry C. 7, 18, p. 5275-5284 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)
1 Downloads (Pure)

On the role of micro-porosity in affecting the environmental stability of atomic/molecular layer deposited (ZnO) : A (Zn-O-C 6 H 4 -O) b films

Aghaee, M., Niemelä, J. P., Kessels, W. M. M. & Creatore, M., 14 Feb 2019, In : Dalton Transactions. 48, 10, p. 3496-3505 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

8 Citations (Scopus)
1 Downloads (Pure)

Performance and thermal stability of an a-Si:H/TiOx/Yb stack as an electron-selective contact in silicon heterojunction solar cells

Cho, J., Melskens, J., Payo, M. R., Debucquoy, M., Radhakrishnan, H. S., Gordon, I., Szlufcik, J., Kessels, W. M. M. & Poortmans, J., 25 Feb 2019, In : ACS Applied Energy Materials. 2, 2, p. 1393-1404 12 p.

Research output: Contribution to journalArticleAcademicpeer-review

8 Citations (Scopus)

Photovoltaic cell and a method for manufacturing the same

Kessels, E. & Black, L., 12 Sep 2019, Patent No. WO2019172770, Priority date 9 Mar 2018, Priority No. NL20182020560 20180309

Research output: PatentPatent publication

Open Access
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9 Downloads (Pure)

Plasma-assisted ALD of LiPO(N) for solid state batteries

Put, B., Mees, M. J., Hornsveld, N., Hollevoet, S., Sepúlveda, A., Vereecken, P. M., Kessels, W. M. M. & Creatore, M., 12 Apr 2019, In : Journal of the Electrochemical Society. 166, 6, p. A1239-A1242 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

7 Citations (Scopus)
3 Downloads (Pure)

Plasma-assisted atomic layer deposition of nickel oxide as hole transport layer for hybrid perovskite solar cells

Koushik, D., Jošt, M., Dučinskas, A., Burgess, C., Zardetto, V., Weijtens, C., Verheijen, M., Kessels, E., Albrecht, S. & Creatore, A., 17 Sep 2019, In : Journal of Materials Chemistry C. 7, 40, p. 12532-12543 12 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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4 Citations (Scopus)
62 Downloads (Pure)

Rear-emitter silicon heterojunction solar cells with atomic layer deposited ZnO:Al serving as an alternative transparent conducting oxide to In2O3:Sn

Niemelä, J., Macco, B., Barraud, L., Descoeudres, A., Badel, N., Despeisse, M., Christmann, G., Nicolay, S., Ballif, C., Kessels, E. & Creatore, A., 15 Sep 2019, In : Solar Energy Materials and Solar Cells. 200, 109953, 5 p., 109953.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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8 Citations (Scopus)
43 Downloads (Pure)

Silicon surface passivation by transparent conductive zinc oxide

van de Loo, B. W. H., Macco, B., Melskens, J., Beyer, W. & Kessels, E., 14 Mar 2019, In : Journal of Applied Physics. 125, 10, 9 p., 105305.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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5 Citations (Scopus)
29 Downloads (Pure)

Status and prospects of plasma-assisted atomic layer deposition

Knoops, H., Faraz, T., Arts, K. & Kessels, E., 1 May 2019, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 37, 3, 26 p., 030902.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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29 Citations (Scopus)
343 Downloads (Pure)

Sticking probabilities of H2O and Al(CH3)3 during atomic layer deposition of Al2O3 extracted from their impact on film conformality

Arts, K., Vandalon, V., Puurunen, R. L., Utriainen, M., Gao, F., Kessels, E. & Knoops, H., 24 Apr 2019, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 37, 3, 5 p., 030908.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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7 Citations (Scopus)
6 Downloads (Pure)

TiO2 thin film patterns prepared by chemical vapor deposition and atomic layer deposition using an atmospheric pressure microplasma printer

Aghaee, M., Verheijen, J., Stevens, A. A. E., Kessels, E. & Creatore, A., Dec 2019, In : Plasma Processes and Polymers. 16, 12, 14 p., 1900127.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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3 Citations (Scopus)
37 Downloads (Pure)

Transition in layer structure of atomic/molecular layer deposited ZnO-zincone multilayers

Niemelä, J., Aghaee, M., Kessels, E., Creatore, A. & Verheijen, M., 1 Jul 2019, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 37, 4, 4 p., 040602.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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1 Citation (Scopus)
6 Downloads (Pure)
2018

Anti-stiction coating for mechanically tunable photonic crystal devices

Petruzzella, M., Zobenica, Cotrufo, M., Zardetto, V., Mameli, A., Pagliano, F., Koelling, S., Van Otten, F. W. M., Roozeboom, F., Kessels, W. M. M., van der Heijden, R. W. & Fiore, A., 19 Feb 2018, In : Optics Express. 26, 4, p. 3882-3891 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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4 Citations (Scopus)
97 Downloads (Pure)

Area-selective atomic layer deposition of metal oxides on noble metals through catalytic oxygen activation

Singh, J. J., Thissen, N. F. W., Kim, W-H., Johnson, H., Kessels, W. M. M., Bol, A. A., Bent, S. F. & Mackus, A. J. M., 13 Feb 2018, In : Chemistry of Materials. 30, 3, p. 663–670 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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36 Citations (Scopus)
177 Downloads (Pure)

Atomic-layer deposited Nb2O5 as transparent passivating electron contact for c-Si solar cells

Macco, B., Black, L. E., Melskens, J., van de Loo, B. W. H., Berghuis, W. J. H., Verheijen, M. A. & Kessels, W. M. M., 1 Sep 2018, In : Solar Energy Materials and Solar Cells. 184, p. 98-104 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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23 Citations (Scopus)
117 Downloads (Pure)

Atomic-layer deposited passivation schemes for c-Si solar cells

van de Loo, B. W. H., Macco, B., Melskens, J., Verheijen, M. A. & Kessels, W. M. M. E., 25 May 2018, 2017 IEEE 44th Photovoltaic Specialist Conference, PVSC 2017. Piscataway: Institute of Electrical and Electronics Engineers, p. 1-6 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Atomic layer deposition of cobalt using H2-, N2-, and NH3-based plasmas: on the role of the Co-reactant

Vos, M. F. J., van Straaten, G., Kessels, W. M. M. & Mackus, A. J. M., 4 Oct 2018, In : Journal of Physical Chemistry C. 122, 39, p. 22519-22529 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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13 Citations (Scopus)
186 Downloads (Pure)

Characterization of nano-porosity in molecular layer deposited films

Perrotta, A., Poodt, P., van den Bruele, F. J., Kessels, W. M. M. & Creatore, M., 1 May 2018, In : Dalton Transactions. 47, 23, p. 7649-7655 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

6 Citations (Scopus)
Open Access
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9 Citations (Scopus)
128 Downloads (Pure)

Controlling mechanical, structural, and optical properties of Al2O3 thin films deposited by plasma-enhanced atomic layer deposition with substrate biasing

Beladiya, V., Faraz, T., Kessels, W. M. M., Tünnermann, A. & Szeghalmi, A., 1 Jan 2018, Advances in Optical Thin Films VI. SPIE, 106910E. (Proceedings of SPIE; vol. 10691).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Downloads (Pure)

Dopant distribution in atomic layer deposited ZnO:Al films visualized by transmission electron microscopy and atom probe tomography

Wu, Y., Giddings, A. D., Verheijen, M. A., Macco, B., Prosa, T. J., Larson, D. J., Roozeboom, F. & Kessels, W. M. M., 27 Feb 2018, In : Chemistry of Materials. 30, 4, p. 1209-1217 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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11 Citations (Scopus)
78 Downloads (Pure)

Effective passivation of silicon surfaces by ultrathin atomic-layer deposited niobium oxide

Macco, B., Bivour, M., Deijkers, J. H., Basuvalingam, S. B., Black, L. E., Melskens, J., van de Loo, B. W. H., Berghuis, W. J. H., Hermle, M. & Kessels, W. M. M., 11 Jun 2018, In : Applied Physics Letters. 112, 24, 242105.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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6 Citations (Scopus)
62 Downloads (Pure)

Explorative studies of novel silicon surface passivation materials: considerations and lessons learned

Black, L. E., van de Loo, B. W. H., Macco, B., Melskens, J., Berghuis, W. J. H. & Kessels, W. M. M., 15 Dec 2018, In : Solar Energy Materials and Solar Cells. 188, p. 182-189 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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12 Citations (Scopus)
187 Downloads (Pure)

Hydrogen passivation of poly-Si/SiOx contacts for Si solar cells using Al2O3 studied with deuterium

Schnabel, M., Van De Loo, B. W. H., Nemeth, W., Macco, B., Stradins, P., Kessels, W. M. M. & Young, D. L., 14 May 2018, In : Applied Physics Letters. 112, 20, 5 p., 203901.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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39 Citations (Scopus)
56 Downloads (Pure)

Initial stage of atomic layer deposition of 2D-MoS2 on a SiO2 surface: A DFT study

Shirazi, M., Kessels, W. M. M. & Bol, A. A., 28 Jun 2018, In : Physical Chemistry Chemical Physics. 20, 24, p. 16861-16875 15 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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4 Citations (Scopus)
198 Downloads (Pure)

Investigating the difference in nucleation during Si-based ALD on different surfaces for future area-selective deposition

Filatova, E. A., Mameli, A., Mackus, A. J. M., Roozeboom, F., Kessels, W. M. M., Hausmann, D. & Elliott, S. D., 2018, 2018 IEEE 18th International Conference on Nanotechnology (IEEE-NANO). Piscataway: Institute of Electrical and Electronics Engineers, 2 p. 8626336

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Downloads (Pure)

Investigation of crystalline silicon surface passivation by positively charged POx/Al2O3 stacks

Black, L. E. & Kessels, W. M. M., 1 Oct 2018, In : Solar Energy Materials and Solar Cells. 185, p. 385-391 7 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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3 Citations (Scopus)
116 Downloads (Pure)

Isotropic atomic layer etching of ZnO using Acetylacetone and O2 plasma

Mameli, A., Verheijen, M. A., Mackus, A. J. M., Kessels, W. M. M. & Roozeboom, F., 7 Nov 2018, In : ACS Applied Materials & Interfaces. 10, 44, p. 38588-38595 8 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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7 Citations (Scopus)
120 Downloads (Pure)
Open Access
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2 Citations (Scopus)
57 Downloads (Pure)

Low resistivity HfN: X grown by plasma-assisted ALD with external rf substrate biasing

Karwal, S., Verheijen, M. A., Williams, B. L., Faraz, T., Kessels, W. M. M. & Creatore, M., 21 Apr 2018, In : Journal of Materials Chemistry C. 6, 15, p. 3917-3926 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

15 Citations (Scopus)
7 Downloads (Pure)

Low-temperature plasma-assisted atomic-layer-deposited SnO2 as an electron transport layer in planar Perovskite solar cells

Kuang, Y., Zardetto, V., van Gils, R. J., Karwal, S., Koushik, D., Verheijen, M. A., Black, L. E., Weijtens, C. H. L., Veenstra, S. C., Andriessen, H. A. J. M. R., Kessels, W. M. M. & Creatore, M., 12 Sep 2018, In : ACS Applied Materials & Interfaces. 10, 36, p. 30367-30378 12 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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24 Citations (Scopus)
544 Downloads (Pure)

Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS2: Large area, thickness control and tuneable morphology

Sharma, A., Verheijen, M. A., Wu, L., Karwal, S., Vandalon, V., Knoops, H. C. M., Sundaram, R. S., Hofmann, J. P., Kessels, W. M. M. & Bol, A. A., 14 May 2018, In : Nanoscale. 10, 18, p. 8615-8627 13 p.

Research output: Contribution to journalArticleAcademicpeer-review

31 Citations (Scopus)

Metastable hydrogenated amorphous silicon (a-Si:H) as reversible programmable photonic material

Mohammed, M. A., Stabile, R., Melskens, J., Kessels, W. M. M. & Raz, O., 26 Nov 2018.

Research output: Contribution to conferencePosterAcademic