400 Gbps 2-Dimensional optical receiver assembled on wet etched silicon interposer

Chenhui Li, Ripalta Stabile, Finn Kraemer, Teng Li, Oded Raz

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)
318 Downloads (Pure)


In this paper, based on a wet etched silicon interposer, we propose a 2.5D assembly of two dimensional optical transceivers for 400 Gbps parallel optical interconnections. In this opto-electronic packaging, two dimensional optical matrix is formed as 250 μm in both the x -and y-directions by exploiting commercial opto-electronic arrays, and a compact optical interface is used to couple the light channels with fiber ribbons. Each quadrant of the optical matrix is connected with its CMOS IC part via impedance matched co-planner wave guides. The shortest traces between optics and CMOS ICs can be 300 μm, benefiting from flip-chip technology. The process flow of silicon interposer fabrication is illustrated. With flip-chip bonding, 25 Gbps 2D 16-channel receiver is assembled on the silicon interposer, and the sub-module, including the optical interface, is scaled down to 4 mm by 6 mm. In addition, the performance of this assembled module is fully characterized. Uniform and clear eye patterns are captured for all of the channels. Receiver sensitivities are also tested for all channels at 25.78 Gbps, 2 31-1 PRBS, with the variation less than 1.5 dB at error free operation.

Original languageEnglish
Title of host publicationProceedings - IEEE 68th Electronic Components and Technology Conference, ECTC 2018
PublisherInstitute of Electrical and Electronics Engineers
Number of pages6
ISBN (Electronic)978-1-5386-4999-2
ISBN (Print)978-1-5386-5000-4
Publication statusPublished - 7 Aug 2018
Event68th IEEE Electronic Components and Technology Conference, (ECTC 2018) - San Diego, United States
Duration: 29 May 20181 Jun 2018


Conference68th IEEE Electronic Components and Technology Conference, (ECTC 2018)
Abbreviated titleECTC2018
Country/TerritoryUnited States
CitySan Diego
Internet address


  • 2-dimensional optical transceiver
  • 2.5D stacking
  • Optical interconnects
  • Silicon ineterposer


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