3D Tactile Sensor for Nanometrology

E.J.C. Bos, F.L.M. Delbressine, A.H. Dietzel

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationMNE 2005
Place of PublicationAustria, Vienna
PagesSeptember 19-22, 200
Publication statusPublished - 2005

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