| Original language | English |
|---|---|
| Title of host publication | MNE 2005 |
| Place of Publication | Austria, Vienna |
| Pages | September 19-22, 200 |
| Publication status | Published - 2005 |
3D Tactile Sensor for Nanometrology
E.J.C. Bos, F.L.M. Delbressine, A.H. Dietzel
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review