3D Tactile Sensor for Nanometrology

E.J.C. Bos, F.L.M. Delbressine, A.H. Dietzel

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original languageEnglish
Title of host publicationMNE 2005
Place of PublicationAustria, Vienna
PagesSeptember 19-22, 200
Publication statusPublished - 2005

Cite this

Bos, E. J. C., Delbressine, F. L. M., & Dietzel, A. H. (2005). 3D Tactile Sensor for Nanometrology. In MNE 2005 (pp. September 19-22, 200). Austria, Vienna.
Bos, E.J.C. ; Delbressine, F.L.M. ; Dietzel, A.H. / 3D Tactile Sensor for Nanometrology. MNE 2005. Austria, Vienna, 2005. pp. September 19-22, 200
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title = "3D Tactile Sensor for Nanometrology",
author = "E.J.C. Bos and F.L.M. Delbressine and A.H. Dietzel",
year = "2005",
language = "English",
pages = "September 19--22, 200",
booktitle = "MNE 2005",

}

Bos, EJC, Delbressine, FLM & Dietzel, AH 2005, 3D Tactile Sensor for Nanometrology. in MNE 2005. Austria, Vienna, pp. September 19-22, 200.

3D Tactile Sensor for Nanometrology. / Bos, E.J.C.; Delbressine, F.L.M.; Dietzel, A.H.

MNE 2005. Austria, Vienna, 2005. p. September 19-22, 200.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - 3D Tactile Sensor for Nanometrology

AU - Bos, E.J.C.

AU - Delbressine, F.L.M.

AU - Dietzel, A.H.

PY - 2005

Y1 - 2005

M3 - Conference contribution

SP - September 19-22, 200

BT - MNE 2005

CY - Austria, Vienna

ER -

Bos EJC, Delbressine FLM, Dietzel AH. 3D Tactile Sensor for Nanometrology. In MNE 2005. Austria, Vienna. 2005. p. September 19-22, 200