3D-Integration on Wafer Level of Photonic and Electronic Circuits

Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Electrical Engineering
Supervisors/Advisors	van der Tol, Jos J.G.M., Promotor Williams, Kevin A., Promotor
Award date	2 Mar 2021
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Print ISBNs	978-90-386-5218-4
Publication status	Published - 2 Mar 2021

Proefschrift.

Access to Document

@phdthesis{3f594559e06240c3a433fa9c9a35e09e,

title = "3D-Integration on Wafer Level of Photonic and Electronic Circuits",

author = "Marc Spiegelberg",

note = "Proefschrift.",

year = "2021",

month = mar,

day = "2",

language = "English",

isbn = "978-90-386-5218-4",

publisher = "Technische Universiteit Eindhoven",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Electrical Engineering",

}