@inproceedings{8cbf070b2b2c456d98518f77fa6929c9,
title = "3D-integrated all-solid-state capacitors",
abstract = "Only abstract.",
author = "F. Roozeboom and E. Langereis and N. Leick and {Sanden, van de}, M.C.M. and W.M.M. Kessels and J.H. Klootwijk and W. Dekkers and E. Tois and M. Tuominen and Y. Lamy and K.B. Jinesh and W.F.A. Besling and A. Roest and C. Bunel",
year = "2010",
language = "English",
pages = "FD--2:IL05--",
booktitle = "Invited presentation at Symposium FD on {\textquoteleft}Electrochemical Energy Storage Systems: the Next Evolution{\textquoteright} of the Forum on New Materials, Montcatini Terme, June 13-18, 2010",
}