3D-integrated all-solid-state capacitors

F. Roozeboom, E. Langereis, N. Leick, M.C.M. Sanden, van de, W.M.M. Kessels, J.H. Klootwijk, W. Dekkers, E. Tois, M. Tuominen, Y. Lamy, K.B. Jinesh, W.F.A. Besling, A. Roest, C. Bunel

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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Abstract

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Original languageEnglish
Title of host publicationInvited presentation at Symposium FD on ‘Electrochemical Energy Storage Systems: the Next Evolution’ of the Forum on New Materials, Montcatini Terme, June 13-18, 2010
PagesFD-2:IL05-
Publication statusPublished - 2010

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