3D electrochemical device

N.A.M. Verhaegh (Inventor), J.H. Klootwijk (Inventor), W.F.A. Besling (Inventor), R.A.H. Niessen (Inventor), Y. Lamy (Inventor), F. Roozeboom (Inventor), P.H.L. Notten (Inventor)

Research output: PatentPatent publication

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Abstract

The present invention relates to a modified rechargeable Li- ion solid- state battery design that is preferably integrated in 3D silicon. The use of photolithography in the manufacture of solid state batteries, such as lithium cells is known, as is the use of various etching techniques such as chemical, ion beam, plasma and sputter etching in the manufacture of such batteries. In particular the use of PVD, CVD and plasma CVD deposition processes and sputter etching to reduce vertical direction stresses during expansion and contraction during charge and discharge is disclosed. Lithium all- so lid- state batteries are based upon the reversible exchange of lithium ions between two electrodes (anode and cathode). These electrodes are separated by a solid-state electrolyte, that allows for lithium ion diffusion-migration and that prevents electron transport.
Original languageEnglish
Patent numberWO2010043991
Publication statusPublished - 22 Apr 2010

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Lithium
Etching
Ions
Plasma CVD
Electrodes
Physical vapor deposition
Patents and inventions
Photolithography
Silicon
Ion beams
Electrolytes
Chemical vapor deposition
Anodes
Cathodes
Plasmas

Cite this

Verhaegh, N. A. M., Klootwijk, J. H., Besling, W. F. A., Niessen, R. A. H., Lamy, Y., Roozeboom, F., & Notten, P. H. L. (2010). 3D electrochemical device. (Patent No. WO2010043991).
Verhaegh, N.A.M. (Inventor) ; Klootwijk, J.H. (Inventor) ; Besling, W.F.A. (Inventor) ; Niessen, R.A.H. (Inventor) ; Lamy, Y. (Inventor) ; Roozeboom, F. (Inventor) ; Notten, P.H.L. (Inventor). / 3D electrochemical device. Patent No.: WO2010043991.
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abstract = "The present invention relates to a modified rechargeable Li- ion solid- state battery design that is preferably integrated in 3D silicon. The use of photolithography in the manufacture of solid state batteries, such as lithium cells is known, as is the use of various etching techniques such as chemical, ion beam, plasma and sputter etching in the manufacture of such batteries. In particular the use of PVD, CVD and plasma CVD deposition processes and sputter etching to reduce vertical direction stresses during expansion and contraction during charge and discharge is disclosed. Lithium all- so lid- state batteries are based upon the reversible exchange of lithium ions between two electrodes (anode and cathode). These electrodes are separated by a solid-state electrolyte, that allows for lithium ion diffusion-migration and that prevents electron transport.",
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Verhaegh, NAM, Klootwijk, JH, Besling, WFA, Niessen, RAH, Lamy, Y, Roozeboom, F & Notten, PHL 2010, 3D electrochemical device, Patent No. WO2010043991.

3D electrochemical device. / Verhaegh, N.A.M. (Inventor); Klootwijk, J.H. (Inventor); Besling, W.F.A. (Inventor); Niessen, R.A.H. (Inventor); Lamy, Y. (Inventor); Roozeboom, F. (Inventor); Notten, P.H.L. (Inventor).

Patent No.: WO2010043991.

Research output: PatentPatent publication

TY - PAT

T1 - 3D electrochemical device

AU - Verhaegh, N.A.M.

AU - Klootwijk, J.H.

AU - Besling, W.F.A.

AU - Niessen, R.A.H.

AU - Lamy, Y.

AU - Roozeboom, F.

AU - Notten, P.H.L.

PY - 2010/4/22

Y1 - 2010/4/22

N2 - The present invention relates to a modified rechargeable Li- ion solid- state battery design that is preferably integrated in 3D silicon. The use of photolithography in the manufacture of solid state batteries, such as lithium cells is known, as is the use of various etching techniques such as chemical, ion beam, plasma and sputter etching in the manufacture of such batteries. In particular the use of PVD, CVD and plasma CVD deposition processes and sputter etching to reduce vertical direction stresses during expansion and contraction during charge and discharge is disclosed. Lithium all- so lid- state batteries are based upon the reversible exchange of lithium ions between two electrodes (anode and cathode). These electrodes are separated by a solid-state electrolyte, that allows for lithium ion diffusion-migration and that prevents electron transport.

AB - The present invention relates to a modified rechargeable Li- ion solid- state battery design that is preferably integrated in 3D silicon. The use of photolithography in the manufacture of solid state batteries, such as lithium cells is known, as is the use of various etching techniques such as chemical, ion beam, plasma and sputter etching in the manufacture of such batteries. In particular the use of PVD, CVD and plasma CVD deposition processes and sputter etching to reduce vertical direction stresses during expansion and contraction during charge and discharge is disclosed. Lithium all- so lid- state batteries are based upon the reversible exchange of lithium ions between two electrodes (anode and cathode). These electrodes are separated by a solid-state electrolyte, that allows for lithium ion diffusion-migration and that prevents electron transport.

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M3 - Patent publication

M1 - WO2010043991

ER -

Verhaegh NAM, Klootwijk JH, Besling WFA, Niessen RAH, Lamy Y, Roozeboom F et al, inventors. 3D electrochemical device. WO2010043991. 2010 Apr 22.