3D Deflectometry platform : fast optical scanning technique for inspection of 110 mm silicon wafers

K.K. Szwedowicz, Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Design and Technology of Instrumentation (DTI)

    Research output: ThesisPd Eng Thesis

    Original languageEnglish
    QualificationDoctor of Philosophy
    Awarding Institution
    • Beijerinck, Herman, Supervisor
    • Amstel, van, W.D., External supervisor, External person
    Award date1 Jan 2003
    Place of PublicationEindhoven
    Print ISBNs90-444-0312-5
    Publication statusPublished - 2003

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