3D Deflectometry platform : fast optical scanning technique for inspection of 110 mm silicon wafers

K.K. Szwedowicz, Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Design and Technology of Instrumentation (DTI)

Research output: Thesis › EngD Thesis

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution
Supervisors/Advisors	Beijerinck, Herman, Supervisor Amstel, van, W.D., External supervisor, External person
Award date	1 Jan 2003
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven. Stan Ackermans Instituut
Print ISBNs	90-444-0312-5
Publication status	Published - 2003

Eindverslag

Cite this

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title = "3D Deflectometry platform : fast optical scanning technique for inspection of 110 mm silicon wafers",

author = "K.K. Szwedowicz and {Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Design and Technology of Instrumentation (DTI)}",

note = "Eindverslag",

year = "2003",

language = "English",

isbn = "90-444-0312-5",

publisher = "Technische Universiteit Eindhoven. Stan Ackermans Instituut",

type = "EngD Thesis",

}

TY - THES

T1 - 3D Deflectometry platform : fast optical scanning technique for inspection of 110 mm silicon wafers

AU - Szwedowicz, K.K.

AU - Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Design and Technology of Instrumentation (DTI)

N1 - Eindverslag

PY - 2003

Y1 - 2003

M3 - EngD Thesis

SN - 90-444-0312-5

PB - Technische Universiteit Eindhoven. Stan Ackermans Instituut

CY - Eindhoven

ER -