3D-deflectometry : fast nanotopography measurement for the semiconductor industry

K.K. Szwedowicz

Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Applied Physics and Science Education
Supervisors/Advisors	Beijerinck, Herman, Promotor Tijhuis, Anton, Promotor Bäumer, Stefan M.B., Copromotor, External person
Award date	8 Nov 2006
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Print ISBNs	978-90-386-0679-8
DOIs	https://doi.org/10.6100/IR609510
Publication status	Published - 2006

Access to Document

@phdthesis{78bb1e4ce42249d687cf685ce86f9b61,

title = "3D-deflectometry : fast nanotopography measurement for the semiconductor industry",

author = "K.K. Szwedowicz",

year = "2006",

doi = "10.6100/IR609510",

language = "English",

isbn = "978-90-386-0679-8",

publisher = "Technische Universiteit Eindhoven",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Applied Physics and Science Education",

}