3D-deflectometry : fast nanotopography measurement for the semiconductor industry

K.K. Szwedowicz

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

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Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Department of Applied Physics
Supervisors/Advisors
  • Beijerinck, Herman, Promotor
  • Tijhuis, Anton, Promotor
  • Bäumer, Stefan M.B., Copromotor, External person
Award date8 Nov 2006
Place of PublicationEindhoven
Publisher
Print ISBNs978-90-386-0679-8
DOIs
Publication statusPublished - 2006

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