3D-deflectometry : fast nanotopography measurement for the semiconductor industry

K.K. Szwedowicz

    Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

    3211 Downloads (Pure)
    Original languageEnglish
    QualificationDoctor of Philosophy
    Awarding Institution
    • Applied Physics
    Supervisors/Advisors
    • Beijerinck, Herman, Promotor
    • Tijhuis, Anton, Promotor
    • Bäumer, Stefan M.B., Copromotor, External person
    Award date8 Nov 2006
    Place of PublicationEindhoven
    Publisher
    Print ISBNs978-90-386-0679-8
    DOIs
    Publication statusPublished - 2006

    Cite this