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165 K microcooler demonstrator with sorption compressor and micromachined cold stage

  • H.J.M. Brake, ter
  • , J.F. Burger
  • , H.J. Holland
  • , M.C. Elwenspoek
  • , H. Rogalla

    Research output: Contribution to journalArticleAcademicpeer-review

    Abstract

    A microcooler consisting of a small sorption compressor and a micromachined expansion stage was designed, constructed, and tested. The working fluid is Xe or C2H4 and temps.
    Original languageEnglish
    Pages (from-to)149-164
    Number of pages16
    JournalDKV-Tagungsbericht
    Volume27
    Issue number1
    Publication statusPublished - 2000

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