165 K microcooler demonstrator with sorption compressor and micromachined cold stage

H.J.M. Brake, ter, J.F. Burger, H.J. Holland, M.C. Elwenspoek, H. Rogalla

    Research output: Contribution to journalArticleAcademicpeer-review

    Abstract

    A microcooler consisting of a small sorption compressor and a micromachined expansion stage was designed, constructed, and tested. The working fluid is Xe or C2H4 and temps.
    Original languageEnglish
    Pages (from-to)149-164
    Number of pages16
    JournalDKV-Tagungsbericht
    Volume27
    Issue number1
    Publication statusPublished - 2000

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