Project Details
| Status | Active |
|---|---|
| Effective start/end date | 1/01/22 → 31/12/28 |
Upgrade EVG UV mask aligner
- de Vries, Tjibbe (Project member)
- Rooijakkers, Wilbert J.M. (Project Manager)
- Dirne, Frank W.A. (Project member)
Project: Third tier
Project: Third tier
| Status | Active |
|---|---|
| Effective start/end date | 1/01/22 → 31/12/28 |