UHV sputter tool metals

  • Dirne, Frank W.A. (Project Manager)
  • Geluk, Erik Jan (Project member)
  • Dijstelbloem, Martijn (Project member)
  • Bax, Patrick (Project member)
  • Jansen, Jeroen (Project member)

Project: Third tier

Project Details

StatusActive
Effective start/end date1/01/2231/12/28