Project Details
| Short title | STW 13919 Darhuber ASML |
|---|---|
| Status | Finished |
| Effective start/end date | 1/04/15 → 31/12/19 |
Towards zero defectivity - Understanding watermark defect formation in immersion lithography
- Darhuber, Anton A. (Project Manager)
- van der Veen, Jørgen M. (Project member)
- van der Heijden, Thijs W.G. (Project member)
- He, Bojia (Project member)
- van der Schoot, Paul P.A.M. (Project member)
Project: Research direct