Project Details
| Status | Finished |
|---|---|
| Effective start/end date | 1/01/18 → 30/11/25 |
Topsector
- TKI-HTSM
TKI mini impuls "Advanced piezo-electric wafer stage for next generation lithography and metrology application"
- Steinbuch, Maarten (Project Manager)
- de Bruijn, Ron (Project member)
Project: Third tier