TKI-HTSM PPS-toeslag Advanced piezo-electric water stage for nextgeneration lithography and metrology application - ASML project 1: Piezo-electric materials and amplifier electronics for wafer stage applicatoin

Project: Third tier

Project Details

StatusActive
Effective start/end date1/01/1830/11/25

Topsector

  • TKI-HTSM