Project Details
| Status | Active |
|---|---|
| Effective start/end date | 1/01/18 → 30/11/25 |
Topsector
- TKI-HTSM
TKI-HTSM PPS-toeslag Advanced piezo-electric water stage for next generation lithography and metrology application - ASML project 1: Piezo-electric materials and amplifier electronics for wafer stage applicatoin
- Lomonova, Elena A. (Project Manager)
- van der Hagen, Daniëlle (Project communication officer)
- Li, Haoyuan (Project member)
Project: Research direct