TKI 2019 Hard-X-Ray source for Wafer Metrology

Mutsaers, Peter H.A. (Project Manager)
Luiten, O.J. (Jom) (Project member)
van den Berg, Rick G.W. (Project member)
van Elk, Ids J.M. (Project member)
Stragier, Xavier F.D. (Project member)
Sweers, Coen W. (Project member)
Oosterink, Samu (Project member)
de Vos, Thomas D.C. (Project member)

Project: Third tier

Description

Hard X-Ray source for wafer metrology

Status	Finished
Effective start/end date	1/01/20 → 10/12/24

Topsector

TKI-HTSM