Project Details
| Status | Active |
|---|---|
| Effective start/end date | 1/01/25 → 31/12/30 |
Topsector
- TKI-HTSM
Sub-nanometer scatterometry for control of surface roughness innanofabricated structures
- Gómez Rivas, Jaime (Project Manager)
- van Klinken, Anne (Project member)
Project: Third tier