Prodrive: Research on a radio frequency bias voltage generator for remote plasma application

Remote plasmas are widely used in industry, for example for dry etching applications in semiconductor industry. Radio Frequency (RF) bias voltage generators are used to generate the required voltage to generate a plasma. Future applications require generators with significantly improved output performance, with respect to output power, bandwidth and efficiency. In this project switched mode technology is developed to replace the existing linear RF amplifiers. This requires innovation in pulse width modulation, gate drivers, very fast control algorithms and high frequency measurement technology in order to realize the necessary operational accuracy. In close cooperation with Prodrive Technologies this research will be realized.