Project Details
| Status | Active |
|---|---|
| Effective start/end date | 1/01/22 → 31/12/27 |
Topsector
- TKI-HTSM
PPS23-2-03576607 MASC CST "Modelling And Shape Control for lithography system applications"
- Oomen, Tom (Project Manager)
- van der Hulst, Maarten (Project member)
Project: Third tier