Plasma driving industrial developments on the nanoscale

Project: Research direct

Project Details


Because device dimensions in the semiconductor industry are decreasing (currently down to about 10 nanometres), the impact of nanoparticles on the manufacturing process is increasing. Ever smaller particles can disrupt the operation of a microchip. Therefore, there is a need for a fundamentally new method. This research examines whether the application of plasma can help minimise the impact of nanoparticles.
Short titleHTSM-TKI
Effective start/end date1/02/1721/12/21


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