Project Details
| Status | Active |
|---|---|
| Effective start/end date | 1/01/25 → 31/12/30 |
Topsector
- TKI-HTSM
Plasma-Assisted Removal of Tin under EUV Source Conditions - 23SP014
- van Dijk, Jan (Project Manager)
- Budé, Rick H.S. (Project member)
Project: Third tier
Project: Third tier
| Status | Active |
|---|---|
| Effective start/end date | 1/01/25 → 31/12/30 |