Project Details
| Status | Active |
|---|---|
| Effective start/end date | 1/03/20 → 31/12/27 |
Topsector
- TKI-HTSM
PhotoLitho, Aberration compensation andsurface chargin M&CS
- ten Thije Boonkkamp, Jan H.M. (Project Manager)
- Barion, Antonio (Project member)
- Verma, Sanjana (Project member)
- Anthonissen, Martijn J.H. (Project member)
Project: Third tier