Next generation of ultrahigh precision power amplifiers for semiconductors lithography

Project: Research direct

Project Details


The latest generations of lithography machines place very high demands on the power amplifiers required to capture ever smaller details at sub-nanometre dimensions. To meet these demands, an entirely new architecture for these amplifiers needs to be developed. This project aims to contribute to development of such architecture. The amplifiers can also be applied in other industries, such as automotive.
Effective start/end date1/05/1721/12/21


Explore the research topics touched on by this project. These labels are generated based on the underlying awards/grants. Together they form a unique fingerprint.