Next generation of ultrahigh precision power amplifiers for semiconductors lithography

Project: Research direct

Project Details

Description

The latest generations of lithography machines place very high demands on the power amplifiers required to capture ever smaller details at sub-nanometre dimensions. To meet these demands, an entirely new architecture for these amplifiers needs to be developed. This project aims to contribute to development of such architecture. The amplifiers can also be applied in other industries, such as automotive.
StatusFinished
Effective start/end date1/05/1721/12/21

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