Project Details
| Status | Active |
|---|---|
| Effective start/end date | 1/01/22 → 31/12/27 |
Topsector
- TKI-HTSM
"Modelling And Shape Control for lithography system applications (MASC) TKI-HTSM/23.0533 PPS23-2-03576607"
- Weiland, Siep (Project Manager)
- Nawijn, Hiltje (Project member)
- Petrulis, Justas (Project member)
Project: Third tier