Project Details
| Status | Finished |
|---|---|
| Effective start/end date | 2/01/17 → 30/11/25 |
Topsector
- TKI-HTSM
Measurement system architecture and design for a piezo-electric wafer stage
- Bente, Erwin A.J.M. (Project Manager)
- Jones, Rachel (Project member)
- Williams, Kevin A. (Project member)
Project: Third tier