Maxwell modeling for chip metrology target electromagnetic-scattering analysis with cross talk (MAX META-XT)

  • van Beurden, Martijn C. (Project Manager)
  • Sun, Ligang (Project member)
  • Sepehripour, Fahimeh (Project member)
  • Sanders, Rianne (Project communication officer)

Project: Research direct

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Earth and Planetary Sciences

Engineering

Physics