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Impuls II: Distributed control design for active wafer table: theory and experiments
Weiland, Siep
(Project Manager)
van der Hagen, Daniëlle
(Project communication officer)
Control Systems
Control of high-precision mechatronic systems
Spatial-Temporal Systems for Control
High Tech Systems Center
EAISI
Project
:
Research direct
Overview
Project Details
Status
Finished
Effective start/end date
1/09/16
→
31/08/20
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