Project Details
| Status | Finished |
|---|---|
| Effective start/end date | 15/04/19 → 30/11/23 |
Topsector
- TKI-HTSM
Active Contamination Control for Equipment and SubstrateS - WDY
- Clercx, Herman J.H. (Project Manager)
- Reinartz, Ralf R.L. (Project member)
Project: Research direct