Project Details
| Status | Active |
|---|---|
| Effective start/end date | 1/01/20 → 1/10/25 |
Topsector
- TKI-HTSM
Active Contamination Control for Equipment and SubstrateS
- Hoefnagels, Johan P.M. (Project Manager)
- Bertens, Tom (Project member)
- Geers, Marc G.D. (Project member)
Project: Third tier