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22.0024 MoPlaMo: "Modular Planar Motor for semicon applications"
Steinbuch, Maarten
(Project Manager)
Looman, Kevin
(Project member)
Cacace, Lennino
(Project member)
Control Systems Technology
EAISI
Mechanical Engineering
Project
:
Third tier
Overview
Project Details
Status
Active
Effective start/end date
1/01/21
→
30/06/27
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Topsector
TKI-HTSM