Projects per year
Personal profile
Quote
"My aim is to advance the field of atomic scale processing for energy and information technologies such as photovoltaics and nanoelectronics"
Research profile
Erwin Kessels is a full professor at the Department of Applied Physics of Eindhoven University of Technology (TU/e). He is also the scientific director of the NanoLab@TU/e facilities which provides full-service and open-access clean room infrastructure for R&D in nanotechnology. Erwin’s research interests cover the field of synthesis of ultrathin films and nanostructures using methods such as (plasma-enhanced) chemical vapor deposition (CVD) and atomic layer deposition (ALD) for a wide variety of applications, mostly within the areas of nanoelectronics and photovoltaics.
Within the field of ALD, he has contributed most prominently by his work on plasma-assisted ALD, his research related to ALD for photovoltaics, and ALD for nanopatterning (including area-selective ALD). Currently, Erwin is focusing his research mostly on atomic scale processing, a field which is believed to grow in importance quickly in the next decade, for a wide variety of application domains.
Academic background
Erwin received his MSc (1996) and PhD (with honors) (2000) in Applied Physics from TU/e. His doctoral thesis work was partly carried out at the University of California Santa Barbara and as a postdoc he was affiliated to the Colorado State University and Philipps University in Marburg (Germany). In 2004/2005 he spent a six-months sabbatical at the University of California Berkeley. In 2007 the American Vacuum Society awarded him the Peter Mark Memorial Award. Erwin received an NWO Vici grant in 2010 to set up a large research program on ‘nanomanufacturing’ in order to bridge the gap between nanoscience/nanotechnology and industrial application. In 2008 he was chair of the International Conference on Atomic Layer Deposition in 2008 (Bruges, Belgium) and in 2019 he received the ALD Innovator award at this yearly conference. Erwin will serve as a chair of the 7th workshop on atomic layer etching in 2020 (Ghent, Belgium). Since 2019 Erwin has also been appointed as Visiting International Professor and a DFG Mercator fellow at the Ruhr University Bochum. Erwin is active within the American Vacuum Society and has been President of the Netherlands Vacuum Society. He is an associate editor of the Journal of Vacuum Science and Technology. He has published over 300 papers, has given 100+ invited presentations, and holds 4 patents. He frequently (co-)organizes ALD-related workshops and is the founder of the ALD Academy (www.ALDacademy) and the blog AtomicLimits.com.
Expertise related to UN Sustainable Development Goals
In 2015, UN member states agreed to 17 global Sustainable Development Goals (SDGs) to end poverty, protect the planet and ensure prosperity for all. This person’s work contributes towards the following SDG(s):
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Collaborations and top research areas from the last five years
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Plasma Source model validation for Atomic-Scale Processing TKI-HTSM/24.0365
Kessels, W. M. M. (Project Manager) & Wubs, J. R. (Project member)
1/01/24 → 31/12/29
Project: Third tier
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TKI-HTSM/24.0176 - ASPEA: Atomic-Scale Processing Equipment for the Ångstrom Era
Mackus, A. J. M. (Project Manager), Macco, B. (Project member), Kessels, W. M. M. (Project member), Lam, C. H. X. (Project member), van Gurp, M. C. (Project member), Krieger, G. (Project member), Vacancy PHD (Project member), Janssen, T. (Project member), Trevisan, A. (Project member) & Vacancy Postdoc (Project member)
1/01/24 → 31/12/29
Project: Third tier
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PMP: Nieuwe materialen voor hoog-temperatuur PICs, nano-gestructureerde oppervlakken, meta-surfaces , nieuwe golflengtes
Macco, B. (Project Manager), Theeuwes, R. J. (Project member), Massaro, L. (Project member) & Kessels, W. M. M. (Project member)
1/01/23 → 12/12/28
Project: Third tier
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Understanding H2 plasma surface interaction: fromEUV optics to 2D materials
Kessels, W. M. M. (Project Manager), Salden, T. P. W. (Project member), van den Biggelaar, T. (Project member), Vacancy Tech (Project member), Vacancy Postdoc (Project member) & Neefs, A. (Project member)
1/01/22 → 9/09/27
Project: Third tier
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Sample Runs
Kessels, W. M. M. (Project Manager) & Kessels, W. M. M. (Project Manager)
1/03/22 → 30/06/25
Project: Third tier
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Growth behavior during metalorganic chemical vapor deposition of MoS2 using di-tert-butyl sulfide as organic sulfur precursor
Deijkers, J. H. (Corresponding author), Medina Silva, H., Manasi, A., Pasko, S., Kessels, W. M. M., Mackus, A. J. M., Groven, B. L. D. & Delabie, A. (Corresponding author), 23 Jan 2026, In: Nanotechnology. 37, 3, 12 p., 035601.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile3 Downloads (Pure) -
Unlocking the synergy of ALD and ALE: tailoring crystallinity and etch rates in ZnO thin films at the atomic scale
Gwoen, J. H., Yang, H. L., Kim, M. C., Jeong, G. M., Kim, T. K., Visser, C., Kessels, W. M. M. (Corresponding author) & Park, J.-S. (Corresponding author), 1 Feb 2026, In: Applied Surface Science. 717, 10 p., 164735.Research output: Contribution to journal › Article › Academic › peer-review
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Area-Selective Atomic Layer Deposition through Selective Passivation of SiO2with a SF6/H2Plasma
Bolkenbaas, O. C. A., Merkx, M. J. M., Chittock, N. J., Tezsevin, I., Kessels, W. M. M., Sandoval, T. E. (Corresponding author) & Mackus, A. J. M. (Corresponding author), 22 Jul 2025, In: Chemistry of Materials. 37, 14, p. 4982-4991 10 p.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile1 Citation (Scopus)83 Downloads (Pure) -
Atomic layer deposition
Kessels, W. M. M. (Corresponding author), Devi, A. P. K., Park, J.-S., Ritala, M., Yanguas-Gil, A. & Wiemer, C., 16 Oct 2025, In: Nature Reviews. Methods Primers. 5, 25 p., 66.Research output: Contribution to journal › Article › Academic › peer-review
8 Citations (Scopus) -
Atomic layer etching of TiN by oxidation and SF6-H2 plasma exposure: ALE window defined by HF, H, and F
Krieger, G. (Corresponding author), Peeters, S. A., Vonken, B., Chittock, N., Mackus, A. J. M., Kessels, W. M. M. & Knoops, H. (Corresponding author), 10 Nov 2025, In: Applied Physics Letters. 127, 19, 6 p., 191606 .Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile4 Downloads (Pure)
Datasets
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Atomic Layer Deposition and Etching Process Schemas Extracted with Schema-Miner
Sadruddin, S. (Creator), D'Souza, J. (Creator), Poupaki, E. (Creator), Watkins, A. (Creator), Giglou, H. B. (Creator), Rula, A. (Creator), Karasulu, B. (Creator), Auer, S. (Creator), Mackus, A. (Creator) & Kessels, W. (Creator), Zenodo, 2 Aug 2025
Dataset
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Data underlying the publication: Packing of inhibitor molecules during area-selective atomic layer deposition studied using random sequential adsorption simulations
Li, J. (Creator), Tezsevin, I. (Creator), Merkx, M. J. M. (Creator), Maas, J. F. W. (Creator), Kessels, W. M. M. (Creator), Sandoval, T. E. (Creator) & Mackus, A. J. M. (Creator), 4TU.Centre for Research Data, 7 Aug 2023
DOI: 10.4121/33df3424-ed9b-49cb-910e-64a6d37aa6b0, https://data.4tu.nl/datasets/33df3424-ed9b-49cb-910e-64a6d37aa6b0 and one more link, https://data.4tu.nl/datasets/33df3424-ed9b-49cb-910e-64a6d37aa6b0/1 (show fewer)
Dataset
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LLMs4SchemaDiscovery: A Human-in-the-Loop Workflow for Scientific Schema Mining with Large Language Models
Sadruddin, S. (Creator), D'Souza, J. (Creator), Poupaki, E. (Creator), Watkins, A. (Creator), Giglou, H. B. (Creator), Rula, A. (Creator), Karasulu, B. (Creator), Auer, S. (Creator), Mackus, A. (Creator) & Kessels, E. (Creator), Zenodo, 2 Oct 2025
Dataset: Software
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Data underlying the publication: Computational Investigation of Precursor Blocking during Area-Selective Atomic Layer Deposition Using Aniline as a Small-Molecule Inhibitor
Tezsevin, I. (Creator), Maas, J. F. W. (Contributor), Merkx, M. J. M. (Creator), Lengers, R. J. (Creator), Kessels, W. M. M. (Creator), Sandoval, T. E. (Creator) & Mackus, A. J. M. (Creator), 4TU.Centre for Research Data, 7 Aug 2023
DOI: 10.4121/0bb03d8b-d1ac-49bc-8010-a498a981cf3e.v1, https://data.4tu.nl/datasets/0bb03d8b-d1ac-49bc-8010-a498a981cf3e/1 and one more link, https://data.4tu.nl/datasets/0bb03d8b-d1ac-49bc-8010-a498a981cf3e (show fewer)
Dataset
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Data underlying the publication: Isotropic atomic layer etching of GaN using SF6 plasma and Al(CH3)3
Chittock, N. J. (Creator), Mackus, A. J. M. (Creator), Shu, Y. (Creator), Elliott, S. D. (Creator), Knoops, H. C. M. (Creator) & Kessels, W. M. M. (Creator), 4TU.Centre for Research Data, 21 Aug 2023
DOI: 10.4121/b7383943-2ae0-4339-8cbf-657765023fd6, https://data.4tu.nl/datasets/b7383943-2ae0-4339-8cbf-657765023fd6 and one more link, https://data.4tu.nl/datasets/b7383943-2ae0-4339-8cbf-657765023fd6/1 (show fewer)
Dataset
Prizes
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ALD Innovator Award
Kessels, E. (Recipient), 22 Jul 2019
Prize: Other › Career, activity or publication related prizes (lifetime, best paper, poster etc.) › Scientific
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NWO Vici Award : Nanotechnology: the path from lab to production
Kessels, W. M. M. (Recipient), 2009
Prize: NWO › Vici › Scientific
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Research Center for Integrated Nano-Photonics
Dorren, H. J. S. (Recipient), Kessels, W. M. M. (Recipient), Koenraad, P. M. (Recipient), Koonen, A. M. J. (Recipient) & Koopmans, B. (Recipient), 2014
Prize: NWO › Gravitation › Scientific
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Plasma-assisted atomic layer deposition: from basics to applications
Kessels, W. M. M. (Speaker)
10 Feb 2021Activity: Talk or presentation types › Keynote talk › Scientific
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SALD (External organisation)
Kessels, W. M. M. (Chair)
17 Sept 2020 → 31 Dec 2023Activity: Membership types › Membership of board › Professional
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New Process Concepts Towards Area-Selective Atomic Layer Deposition and Atomic Layer Etching of Zinc Oxide
Mameli, A. (Member), Verheijen, M. A. (Member), Karasulu, B. (Member), Mackus, A. J. M. (Member), Kessels, W. M. M. (Member) & Roozeboom, F. (Speaker)
30 Sept 2018 → 4 Oct 2018Activity: Talk or presentation types › Contributed talk › Scientific
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Atomic Layer Etching of ZnO on 2D and 3D substrates, using acetylacetone and O2 plasma
Mameli, A. (Member), Verheijen, M. A. (Member), Karasulu, B. (Member), Mackus, A. J. M. (Member), Kessels, W. M. M. (Member) & Roozeboom, F. (Invited speaker)
24 Jul 2018 → 28 Jul 2018Activity: Talk or presentation types › Invited talk › Scientific
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Journal of Vacuum Science and Technology A (Journal)
Kessels, W. M. M. (Editorial board member)
2015 → …Activity: Publication peer-review and editorial work types › Editorial activity › Scientific
Courses
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Plasma processing science and technology
Deijkers, J. H., Kessels, W. M. M., Knoops, H. C. M. & Mackus, A. J. M. 1/09/17 → 31/08/26
Course
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Semiconductor Nanofabrication Science & Technology
Mackus, A. J. M., Kessels, W. M. M., Knoops, H. C. M., Macco, B. & Langereis, E. 1/09/25 → 31/08/26
Course
Press/Media
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Verliert Comet den Anschluss an die nächste Halbleitergeneration?
7/07/25
1 Media contribution
Press/Media: Expert Comment
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Bedrijf van Matthijs (29) haalt 20 miljoen binnen voor maken van supercomputer: 'Gaat wereld veranderen'
6/03/25
1 Media contribution
Press/Media: Expert Comment
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Technische Universiteit Eindhoven gaat ‘twee keer zoveel studenten opleiden’ voor de chipsector
27/07/24
1 Media contribution
Press/Media: Expert Comment
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Nearfield eist vanuit Rotterdam zijn plaats in de wereldwijde chipmarkt op
30/06/24
1 Media contribution
Press/Media: Expert Comment
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Einde aan de panelenhonger: heeft zonne-energie nog toekomst in Nederland?
1/06/24
1 Media contribution
Press/Media: Expert Comment
Research areas
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Advanced ALD technologies
Creatore, A. (Researcher), Kessels, E. (Researcher) & Mackus, A. (Researcher)
Impact: Research Topic/Theme (at group level)
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CO2 neutral fuels
Engeln, R. (Researcher) & Kessels, E. (Researcher)
Impact: Research Topic/Theme (at group level)
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Fundamentals of ultrathin film growth
Kessels, E. (Researcher) & Bol, A. (Researcher)
Impact: Research Topic/Theme (at group level)
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Future nanoelectronics and nanopatterning
Bol, A. (Researcher), Kessels, E. (Researcher) & Mackus, A. (Content manager)
Impact: Research Topic/Theme (at group level)
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Nanolayers for solar cells
Creatore, A. (Researcher) & Kessels, E. (Content manager)
Impact: Research Topic/Theme (at group level)
Thesis
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The influence of the substrate conditions on plasma beam deposited a-C:H-films
Kessels, W. M. M. (Author), Gielen, J. W. A. M. (Supervisor 1), van de Sanden, M. C. M. (Supervisor 2) & Schram, D. C. (Supervisor 2), 31 Aug 1996Student thesis: Master
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