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Personal profile

Quote

"My aim is to advance the field of atomic scale processing for energy and information technologies such as photovoltaics and nanoelectronics"

Research profile

Erwin Kessels is a full professor at the Department of Applied Physics of Eindhoven University of Technology (TU/e). He is also the scientific director of the NanoLab@TU/e facilities which provides full-service and open-access clean room infrastructure for R&D in nanotechnology. Erwin’s research interests cover the field of synthesis of ultrathin films and nanostructures using methods such as (plasma-enhanced) chemical vapor deposition (CVD) and atomic layer deposition (ALD) for a wide variety of applications, mostly within the areas of nanoelectronics and photovoltaics.

Within the field of ALD, he has contributed most prominently by his work on plasma-assisted ALD, his research related to ALD for photovoltaics, and ALD for nanopatterning (including area-selective ALD). Currently, Erwin is focusing his research mostly on atomic scale processing, a field which is believed to grow in importance quickly in the next decade, for a wide variety of application domains.

Academic background

Erwin received his MSc (1996) and PhD (with honors) (2000) in Applied Physics from TU/e. His doctoral thesis work was partly carried out at the University of California Santa Barbara and as a postdoc he was affiliated to the Colorado State University and Philipps University in Marburg (Germany). In 2004/2005 he spent a six-months sabbatical at the University of California Berkeley. In 2007 the American Vacuum Society awarded him the Peter Mark Memorial Award. Erwin received an NWO Vici grant in 2010 to set up a large research program on ‘nanomanufacturing’ in order to bridge the gap between nanoscience/nanotechnology and industrial application. In 2008 he was chair of the International Conference on Atomic Layer Deposition in 2008 (Bruges, Belgium) and in 2019 he received the ALD Innovator award at this yearly conference. Erwin will serve as a chair of the 7th workshop on atomic layer etching in 2020 (Ghent, Belgium). Since 2019 Erwin has also been appointed as Visiting International Professor and a DFG Mercator fellow at the Ruhr University Bochum. Erwin is active within the American Vacuum Society and has been President of the Netherlands Vacuum Society. He is an associate editor of the Journal of Vacuum Science and Technology. He has published over 300 papers, has given 100+ invited presentations, and holds 4 patents. He frequently (co-)organizes ALD-related workshops and is the founder of the ALD Academy (www.ALDacademy) and the blog AtomicLimits.com.

 

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  • 10 Similar Profiles
Atomic layer deposition Engineering & Materials Science
atomic layer epitaxy Physics & Astronomy
Plasmas Engineering & Materials Science
passivity Physics & Astronomy
solar cells Physics & Astronomy
Passivation Engineering & Materials Science
thermal plasmas Physics & Astronomy
amorphous silicon Physics & Astronomy

Network Recent external collaboration on country level. Dive into details by clicking on the dots.

Research Output 1996 2019

1 Citation (Scopus)

Area-selective atomic layer deposition of ZnO by area activation using electron beam-induced deposition

Mameli, A., Karasulu, B., Verheijen, M., Barcones Campo, B., Macco, B., Mackus, A., Kessels, E. & Roozeboom, F., 31 Jan 2019, In : Chemistry of Materials. 31, 4, p. 1250-1257

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Atomic layer deposition
Electron beams
Chemical activation
Density functional theory
Temperature

Area-selective deposition of Ruthenium by combining atomic layer deposition and selective etching

Vos, M. F. J., Chopra, S. N., Verheijen, M. A., Ekerdt, J. G., Agarwal, S., Kessels, W. M. M. & Mackus, A. J. M., 22 May 2019, In : Chemistry of Materials. 31, 11, p. 3878-3882

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
2 Citations (Scopus)

Atomic layer deposition of cobalt phosphate thin films for the oxygen evolution reaction

Di Palma, V., Zafeiropoulos, G., Goldsweer, T., Kessels, W. M. M., van de Sanden, M. C. M., Creatore, M. & Tsampas, M. N., 1 Jan 2019, In : Electrochemistry Communications. 98, p. 73-77 5 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Atomic layer deposition
Cobalt
Phosphates
Electrocatalysts
Oxygen
3 Citations (Scopus)

Chemical analysis of the interface between hybrid organic−inorganic perovskite and atomic layer deposited Al2O3

Koushik, D., Hazendonk, L., Zardetto, V., Vandalon, V., Verheijen, M. A., Kessels, W. M. M. & Creatore, M., 9 Jan 2019, In : ACS Applied Materials & Interfaces. 11, p. 5526-5535 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Perovskite
Atomic layer deposition
Chemical analysis
Infrared radiation
Stretching

Data on dopant characteristics and band alignment of CdTe cells with and without a ZnO highly-resistive-transparent buffer layer

Kartopu, G., Williams, B. L., Zardetto, V., Gürlek, A. K., Clayton, A. J., Jones, S., Kessels, W. M. M., Creatore, M. & Irvine, S. J. C., 1 Feb 2019, In : Data in Brief. 22, p. 218-221 4 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Zinc Oxide
Buffers
Secondary Ion Mass Spectrometry
Equipment and Supplies
Arsenic

Prizes

ALD Innovator Award

Erwin Kessels (Recipient), 22 Jul 2019

Recognition: OtherCareer, activity or publication related prizes (lifetime, best paper, poster etc.)Scientific

NWO Vici Award : Nanotechnology: the path from lab to production

Erwin Kessels (Recipient), 2009

Recognition: NWOViciScientific

nanotechnology
industrial production
manufacturing
electronics
product

Research Center for Integrated Nano-Photonics

H.J.S. Dorren (Recipient), Erwin Kessels (Recipient), Paul Koenraad (Recipient), Ton Koonen (Recipient) & Bert Koopmans (Recipient), 2014

Recognition: NWOGravitationScientific

Netherlands
selection procedure
Ministry of Education
funding
organization

Activities 2004 2018

  • 14 Contributed talk
  • 8 Invited talk
  • 1 Editorial activity

New Process Concepts Towards Area-Selective Atomic Layer Deposition and Atomic Layer Etching of Zinc Oxide

A. Mameli (Member), M.A. Verheijen (Member), B. Karasulu (Member), A.J.M. Mackus (Member), W.M.M. Kessels (Member), F. Roozeboom (Speaker)
30 Sep 20184 Oct 2018

Activity: Talk or presentation typesContributed talkScientific

Atomic Layer Etching of ZnO on 2D and 3D substrates, using acetylacetone and O2 plasma

A. Mameli (Member), M.A. Verheijen (Member), B. Karasulu (Member), A.J.M. Mackus (Member), W.M.M. Kessels (Member), F. Roozeboom (Invited speaker)
24 Jul 201828 Jul 2018

Activity: Talk or presentation typesInvited talkScientific

Journal of Vacuum Science and Technology. A: Vacuum, Surfaces, and Films (Journal)

W.M.M. (Erwin) Kessels (Editorial board member)
2015 → …

Activity: Publication peer-review and editorial work typesEditorial activityScientific

Applied Materials, Santa Clara, CA, USA

W.M.M. (Erwin) Kessels (Invited speaker)
1 Jul 2010

Activity: Talk or presentation typesInvited talkScientific

Samsung Electronics, Yongin-City, Korea

W.M.M. (Erwin) Kessels (Invited speaker)
1 Apr 2010

Activity: Talk or presentation typesInvited talkScientific

Courses

Press / Media

Eindhovens zonnecelonderzoek moet industrieel landen

Erwin Kessels

1/01/13

1 media contribution

Press/Media: Public Engagement Activities

Nieuw lab voor TU/e en Solliance

Erwin Kessels

1/01/13

1 media contribution

Press/Media: Public Engagement Activities

Prof.dr.ir. Erwin Kessels "Je moet je eigen pad uitstippelen"

Erwin Kessels

1/01/13

1 media contribution

Press/Media: Public Engagement Activities

TEM bekijkt atomen in zonnecel

Erwin Kessels

1/01/13

1 media contribution

Press/Media: Public Engagement Activities

Een zonnige toekomst voor ALD - Interview

Erwin Kessels

1/01/08

1 media contribution

Press/Media: Public Engagement Activities

Impacts

Advanced ALD technologies

M. (Adriana) Creatore (Researcher), W.M.M. (Erwin) Kessels (Researcher), Adrie J.M. Mackus (Researcher)

Impact: Research Topic/Theme (at group level)

CO2 neutral fuels

Richard A.H. Engeln (Researcher), W.M.M. (Erwin) Kessels (Researcher)

Impact: Research Topic/Theme (at group level)

Fundamentals of ultrathin film growth

W.M.M. (Erwin) Kessels (Researcher), Ageeth A. Bol (Researcher)

Impact: Research Topic/Theme (at group level)

Future nanoelectronics and nanopatterning

Ageeth A. Bol (Researcher), W.M.M. (Erwin) Kessels (Researcher), Adrie J.M. Mackus (Content manager)

Impact: Research Topic/Theme (at group level)

Nanolayers for solar cells

M. (Adriana) Creatore (Researcher), W.M.M. (Erwin) Kessels (Content manager)

Impact: Research Topic/Theme (at group level)

Student theses

Analysis of blister formation in spatial ALD Al2O3 for silicon surface passivation in photovoltaics

Author: Hennen, L., 31 Aug 2012

Supervisor: Kessels, W. (Supervisor 1) & Granneman, E. (External person) (External coach)

Student thesis: Master

File

Anti-reflection coating characterization using scattered polarized light

Author: Ketelaars, H., 31 Aug 2014

Supervisor: Kessels, W. (Supervisor 1) & van Gerwen, B. (Supervisor 2)

Student thesis: Master

File
File

Atomic layer deposition and electron beam induced deposition as nanomanufacturing tools for the fabrication of carbon nanotube contacts

Author: Dielissen, S., 31 Aug 2011

Supervisor: Mackus, A. (Supervisor 1), Fernández Landaluce, T. (External coach) & Kessels, W. (Supervisor 2)

Student thesis: Master

File

Atomic layer deposition of In2O3: growth, morphology and hydrogen doping

Author: Vanhemel, D., 31 Mar 2015

Supervisor: Wu, Y. (Supervisor 1), Roozeboom, F. (Supervisor 2) & Kessels, W. (Supervisor 2)

Student thesis: Master

File