Projects per year
Personal profile
Quote
"My aim is to advance the field of atomic scale processing for energy and information technologies such as photovoltaics and nanoelectronics"
Research profile
Erwin Kessels is a full professor at the Department of Applied Physics of Eindhoven University of Technology (TU/e). He is also the scientific director of the NanoLab@TU/e facilities which provides full-service and open-access clean room infrastructure for R&D in nanotechnology. Erwin’s research interests cover the field of synthesis of ultrathin films and nanostructures using methods such as (plasma-enhanced) chemical vapor deposition (CVD) and atomic layer deposition (ALD) for a wide variety of applications, mostly within the areas of nanoelectronics and photovoltaics.
Within the field of ALD, he has contributed most prominently by his work on plasma-assisted ALD, his research related to ALD for photovoltaics, and ALD for nanopatterning (including area-selective ALD). Currently, Erwin is focusing his research mostly on atomic scale processing, a field which is believed to grow in importance quickly in the next decade, for a wide variety of application domains.
Academic background
Erwin received his MSc (1996) and PhD (with honors) (2000) in Applied Physics from TU/e. His doctoral thesis work was partly carried out at the University of California Santa Barbara and as a postdoc he was affiliated to the Colorado State University and Philipps University in Marburg (Germany). In 2004/2005 he spent a six-months sabbatical at the University of California Berkeley. In 2007 the American Vacuum Society awarded him the Peter Mark Memorial Award. Erwin received an NWO Vici grant in 2010 to set up a large research program on ‘nanomanufacturing’ in order to bridge the gap between nanoscience/nanotechnology and industrial application. In 2008 he was chair of the International Conference on Atomic Layer Deposition in 2008 (Bruges, Belgium) and in 2019 he received the ALD Innovator award at this yearly conference. Erwin will serve as a chair of the 7th workshop on atomic layer etching in 2020 (Ghent, Belgium). Since 2019 Erwin has also been appointed as Visiting International Professor and a DFG Mercator fellow at the Ruhr University Bochum. Erwin is active within the American Vacuum Society and has been President of the Netherlands Vacuum Society. He is an associate editor of the Journal of Vacuum Science and Technology. He has published over 300 papers, has given 100+ invited presentations, and holds 4 patents. He frequently (co-)organizes ALD-related workshops and is the founder of the ALD Academy (www.ALDacademy) and the blog AtomicLimits.com.
Expertise related to UN Sustainable Development Goals
In 2015, UN member states agreed to 17 global Sustainable Development Goals (SDGs) to end poverty, protect the planet and ensure prosperity for all. This person’s work contributes towards the following SDG(s):
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Metal Oxides: Maturing of an Efficient Novel Technology Upgrade for PV-Manufacturing
Kessels, W. M. M., Koushik, D. & Theeuwes, R. J.
1/02/20 → 30/06/22
Project: Research direct
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BRIGHT TKI toeslag
Kessels, W. M. M., Macco, B., Faraz, T. & Koushik, D.
1/08/18 → 31/05/21
Project: Research direct
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3DAM
Kessels, W. M. M., Vandalon, V., van Bommel, C., Shirazi, M., Faraz, T. & Schulpen, J. J. P. M.
1/04/16 → 1/04/19
Project: Research direct
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After enabling AI it is time for the plasma community to benefit from AI
Kessels, W. M. M., 12 Apr 2023, In: ILTPC Newsletter. 31, p. 4 1 p.Research output: Contribution to journal › Article › Professional
Open AccessFile8 Downloads (Pure) -
Computational investigation of precursor blocking during area-selective atomic layer deposition using aniline as a small molecule inhibitor
Tezsevin, I., Maas, J. F. W., Merkx, M. J. M., Lengers, R., Kessels, W. M. M., Sandoval, T. E. & Mackus, A. J. M., 28 Mar 2023, In: Langmuir. 39, 12, p. 4265-4273 9 p.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile16 Downloads (Pure) -
Hydrogenation of p+ poly-Si by Al2O3 nanolayers prepared by atomic layer deposition
Theeuwes, R. J., Melskens, J., Beyer, W., Breuer, U., Gutjahr, A., Mewe, A., Macco, B. & Kessels, W. M. M., 10 Apr 2023, In: Journal of Applied Physics. 133, 14, 12 p., 145301.Research output: Contribution to journal › Article › Academic › peer-review
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MoS2 Synthesized by Atomic Layer Deposition as Cu Diffusion Barrier
Deijkers, J. H., de Jong, A. A., Mattinen, M., Schulpen, J. J. P. M., Verheijen, M. A., Sprey, H., Maes, J. W., Kessels, W. M. M., Bol, A. A. & Mackus, A. J. M., 24 Apr 2023, In: Advanced Materials Interfaces. 10, 12, 6 p., 2202426.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile7 Downloads (Pure) -
Optical Simulation-Aided Design and Engineering of Monolithic Perovskite/Silicon Tandem Solar Cells
Zhao, Y., Datta, K., Phung, N., Bracesco, A. E. A., Zardetto, V., Paggiaro, G., Liu, H., Fardousi, M., Santbergen, R., Procel Moya, P., Han, C., Yang, G., Wang, J., Zhang, D., van Gorkom, B. T., van der Pol, T. P. A., Verhage, M., Wienk, M. M., Kessels, W. M. M., Weeber, A., & 5 others , 22 May 2023, In: ACS Applied Energy Materials. 6, 10, p. 5217-5229 13 p.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile
Prizes
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ALD Innovator Award
Kessels, W.M.M. (Erwin) (Recipient), 22 Jul 2019
Prize: Other › Career, activity or publication related prizes (lifetime, best paper, poster etc.) › Scientific
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NWO Vici Award : Nanotechnology: the path from lab to production
Kessels, W.M.M. (Erwin) (Recipient), 2009
Prize: NWO › Vici › Scientific
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Research Center for Integrated Nano-Photonics
Dorren, H.J.S. (Recipient), Kessels, W.M.M. (Erwin) (Recipient), Koenraad, Paul M. (Recipient), Koonen, A.M.J. (Ton) (Recipient) & Koopmans, Bert (Recipient), 2014
Prize: NWO › Gravitation › Scientific
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Plasma-assisted atomic layer deposition: from basics to applications
W.M.M. (Erwin) Kessels (Speaker)
10 Feb 2021Activity: Talk or presentation types › Keynote talk › Scientific
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SALD (External organisation)
W.M.M. (Erwin) Kessels (Chair)
17 Sept 2020 → 31 Dec 2023Activity: Membership types › Membership of board › Professional
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New Process Concepts Towards Area-Selective Atomic Layer Deposition and Atomic Layer Etching of Zinc Oxide
A. Mameli (Member), M.A. Verheijen (Member), B. Karasulu (Member), A.J.M. Mackus (Member), W.M.M. Kessels (Member) & F. Roozeboom (Speaker)
30 Sept 2018 → 4 Oct 2018Activity: Talk or presentation types › Contributed talk › Scientific
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Atomic Layer Etching of ZnO on 2D and 3D substrates, using acetylacetone and O2 plasma
A. Mameli (Member), M.A. Verheijen (Member), B. Karasulu (Member), A.J.M. Mackus (Member), W.M.M. Kessels (Member) & F. Roozeboom (Invited speaker)
24 Jul 2018 → 28 Jul 2018Activity: Talk or presentation types › Invited talk › Scientific
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Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films (Journal)
W.M.M. (Erwin) Kessels (Editorial board member)
2015 → …Activity: Publication peer-review and editorial work types › Editorial activity › Scientific
Courses
Press/Media
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2D TMD Materials Enabling Future Electronics
Shashank Balasubramanyam, Marc J.M. Merkx, Marcel A. Verheijen, W.M.M. (Erwin) Kessels, Adrie J.M. Mackus & Ageeth A. Bol
27/06/21
1 Media contribution
Press/Media: Expert Comment
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Prof.dr.ir. Erwin Kessels "Je moet je eigen pad uitstippelen"
1/01/13
1 Media contribution
Press/Media: Public Engagement Activities
Impacts
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Advanced ALD technologies
M. (Adriana) Creatore (Researcher), W.M.M. (Erwin) Kessels (Researcher) & Adrie J.M. Mackus (Researcher)
Impact: Research Topic/Theme (at group level)
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CO2 neutral fuels
Richard A.H. Engeln (Researcher) & W.M.M. (Erwin) Kessels (Researcher)
Impact: Research Topic/Theme (at group level)
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Fundamentals of ultrathin film growth
W.M.M. (Erwin) Kessels (Researcher) & Ageeth Bol (Researcher)
Impact: Research Topic/Theme (at group level)
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Future nanoelectronics and nanopatterning
Ageeth Bol (Researcher), W.M.M. (Erwin) Kessels (Researcher) & Adrie J.M. Mackus (Content manager)
Impact: Research Topic/Theme (at group level)
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Nanolayers for solar cells
M. (Adriana) Creatore (Researcher) & W.M.M. (Erwin) Kessels (Content manager)
Impact: Research Topic/Theme (at group level)
Thesis
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The influence of the substrate conditions on plasma beam deposited a-C:H-films
Author: Kessels, W. M. M., 31 Aug 1996Supervisor: Gielen, J. W. A. M. (Supervisor 1), van de Sanden, M. C. M. (Supervisor 2) & Schram, D. C. (Supervisor 2)
Student thesis: Master
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