• 14047 Citations
19962020

Research output per year

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Personal profile

Quote

"My aim is to advance the field of atomic scale processing for energy and information technologies such as photovoltaics and nanoelectronics"

Research profile

Erwin Kessels is a full professor at the Department of Applied Physics of Eindhoven University of Technology (TU/e). He is also the scientific director of the NanoLab@TU/e facilities which provides full-service and open-access clean room infrastructure for R&D in nanotechnology. Erwin’s research interests cover the field of synthesis of ultrathin films and nanostructures using methods such as (plasma-enhanced) chemical vapor deposition (CVD) and atomic layer deposition (ALD) for a wide variety of applications, mostly within the areas of nanoelectronics and photovoltaics.

Within the field of ALD, he has contributed most prominently by his work on plasma-assisted ALD, his research related to ALD for photovoltaics, and ALD for nanopatterning (including area-selective ALD). Currently, Erwin is focusing his research mostly on atomic scale processing, a field which is believed to grow in importance quickly in the next decade, for a wide variety of application domains.

Academic background

Erwin received his MSc (1996) and PhD (with honors) (2000) in Applied Physics from TU/e. His doctoral thesis work was partly carried out at the University of California Santa Barbara and as a postdoc he was affiliated to the Colorado State University and Philipps University in Marburg (Germany). In 2004/2005 he spent a six-months sabbatical at the University of California Berkeley. In 2007 the American Vacuum Society awarded him the Peter Mark Memorial Award. Erwin received an NWO Vici grant in 2010 to set up a large research program on ‘nanomanufacturing’ in order to bridge the gap between nanoscience/nanotechnology and industrial application. In 2008 he was chair of the International Conference on Atomic Layer Deposition in 2008 (Bruges, Belgium) and in 2019 he received the ALD Innovator award at this yearly conference. Erwin will serve as a chair of the 7th workshop on atomic layer etching in 2020 (Ghent, Belgium). Since 2019 Erwin has also been appointed as Visiting International Professor and a DFG Mercator fellow at the Ruhr University Bochum. Erwin is active within the American Vacuum Society and has been President of the Netherlands Vacuum Society. He is an associate editor of the Journal of Vacuum Science and Technology. He has published over 300 papers, has given 100+ invited presentations, and holds 4 patents. He frequently (co-)organizes ALD-related workshops and is the founder of the ALD Academy (www.ALDacademy) and the blog AtomicLimits.com.

 

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Research Output

Atomic layer deposition of aluminum phosphate using AlMe3, PO(OMe)3 and O2 plasma: film growth and surface reactions

Hornsveld, N., Kessels, W. M. M. E. & Creatore, M. A., 5 Mar 2020, In : Journal of Physical Chemistry C. 124, 9, p. 5495-5505 11 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
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  • Effect of an electric field during the deposition of silicon dioxide thin films by plasma enhanced atomic layer deposition: an experimental and computational study

    Beladiya, V., Becker, M., Faraz, T., Kessels, W. M. M., Schenk, P., Otto, F., Fritz, T., Gruenewald, M., Helbing, C., Jandt, K. D., Tünnermann, A., Sierka, M. & Szeghalmi, A., 21 Jan 2020, In : Nanoscale. 12, 3, p. 2089-2102 14 p.

    Research output: Contribution to journalArticleAcademicpeer-review

  • 1 Citation (Scopus)
    1 Downloads (Pure)
    Open Access
    File
  • Prizes

    ALD Innovator Award

    Erwin Kessels (Recipient), 22 Jul 2019

    Prize: OtherCareer, activity or publication related prizes (lifetime, best paper, poster etc.)Scientific

    NWO Vici Award : Nanotechnology: the path from lab to production

    W.M.M. Kessels (Recipient), 2009

    Prize: NWOViciScientific

  • Research Center for Integrated Nano-Photonics

    H.J.S. Dorren (Recipient), W.M.M. Kessels (Recipient), P.M. Koenraad (Recipient), A.M.J. Koonen (Recipient) & B. Koopmans (Recipient), 2014

    Prize: NWOGravitationScientific

  • Activities

    • 14 Contributed talk
    • 8 Invited talk
    • 1 Editorial activity

    New Process Concepts Towards Area-Selective Atomic Layer Deposition and Atomic Layer Etching of Zinc Oxide

    A. Mameli (Member), M.A. Verheijen (Member), B. Karasulu (Member), A.J.M. Mackus (Member), W.M.M. Kessels (Member), F. Roozeboom (Speaker)
    30 Sep 20184 Oct 2018

    Activity: Talk or presentation typesContributed talkScientific

    Atomic Layer Etching of ZnO on 2D and 3D substrates, using acetylacetone and O2 plasma

    A. Mameli (Member), M.A. Verheijen (Member), B. Karasulu (Member), A.J.M. Mackus (Member), W.M.M. Kessels (Member), F. Roozeboom (Invited speaker)
    24 Jul 201828 Jul 2018

    Activity: Talk or presentation typesInvited talkScientific

    Journal of Vacuum Science and Technology. A: Vacuum, Surfaces, and Films (Journal)

    W.M.M. (Erwin) Kessels (Editorial board member)
    2015 → …

    Activity: Publication peer-review and editorial work typesEditorial activityScientific

    Applied Materials, Santa Clara, CA, USA

    W.M.M. (Erwin) Kessels (Invited speaker)
    1 Jul 2010

    Activity: Talk or presentation typesInvited talkScientific

    LG Electronics, Seoul, Korea

    W.M.M. (Erwin) Kessels (Invited speaker)
    1 Apr 2010

    Activity: Talk or presentation typesInvited talkScientific

    Courses

    Press / Media

    TEM bekijkt atomen in zonnecel

    W.M.M. (Erwin) Kessels

    1/01/13

    1 Media contribution

    Press/Media: Public Engagement Activities

    Eindhovens zonnecelonderzoek moet industrieel landen

    W.M.M. (Erwin) Kessels

    1/01/13

    1 Media contribution

    Press/Media: Public Engagement Activities

    Nieuw lab voor TU/e en Solliance

    W.M.M. (Erwin) Kessels

    1/01/13

    1 Media contribution

    Press/Media: Public Engagement Activities

    Prof.dr.ir. Erwin Kessels "Je moet je eigen pad uitstippelen"

    W.M.M. (Erwin) Kessels

    1/01/13

    1 Media contribution

    Press/Media: Public Engagement Activities

    Een zonnige toekomst voor ALD - Interview

    W.M.M. (Erwin) Kessels

    1/01/08

    1 Media contribution

    Press/Media: Public Engagement Activities

    Impacts

    Advanced ALD technologies

    M. (Adriana) Creatore (Researcher), W.M.M. (Erwin) Kessels (Researcher), Adrie Mackus (Researcher)

    Impact: Research Topic/Theme (at group level)

    CO2 neutral fuels

    Richard A.H. Engeln (Researcher), W.M.M. (Erwin) Kessels (Researcher)

    Impact: Research Topic/Theme (at group level)

    Fundamentals of ultrathin film growth

    W.M.M. (Erwin) Kessels (Researcher), Ageeth A. Bol (Researcher)

    Impact: Research Topic/Theme (at group level)

    Future nanoelectronics and nanopatterning

    Ageeth A. Bol (Researcher), W.M.M. (Erwin) Kessels (Researcher), Adrie Mackus (Content manager)

    Impact: Research Topic/Theme (at group level)

    Nanolayers for solar cells

    M. (Adriana) Creatore (Researcher), W.M.M. (Erwin) Kessels (Content manager)

    Impact: Research Topic/Theme (at group level)

    Student theses

    ALD metal oxides for passivating contacts: in c-Si solar cells

    Author: Scheerder, R., 2017

    Supervisor: Melskens, J. (Supervisor 1), van de Loo, B. W. (Supervisor 2) & Kessels, W. (. (Supervisor 2)

    Student thesis: Master

    File

    Analysis of blister formation in spatial ALD Al2O3 for silicon surface passivation in photovoltaics

    Author: Hennen, L., 31 Aug 2012

    Supervisor: Kessels, W. (Supervisor 1) & Granneman, E. (External person) (External coach)

    Student thesis: Master

    File

    Anti-reflection coating characterization using scattered polarized light

    Author: Ketelaars, H., 31 Aug 2014

    Supervisor: Kessels, W. (Supervisor 1) & van Gerwen, B. (Supervisor 2)

    Student thesis: Master

    File
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