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  • 2009

    Lithographic apparatus and device manufacturing method

    Herpen, van, M. W., Banine, V. Y., Kuster, de, J. P. H., Moors, R., Stevens, L. H. J., Wolschrijn, B. T., Sidelnikov, Y., Velden, van der, M. H., Soer, W. A., Stein, T. & Gielissen, K., 9 Jul 2009, Patent No. US2009173360

    Research output: PatentPatent publication

    9 Downloads (Pure)