Tim Houben – Research output — Research portal Eindhoven University of Technology

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7 Conference contribution
5 Article
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2023
Method and system of image analysis and critical dimension matching for charged-particle inspection apparatus
Houben, T. (Inventor), Pisarenco, M. (Inventor), Huisman, T. (Inventor), Pu, L. (Inventor), Zhou, J. (Inventor), Yu, L. (Inventor), Chang, Y.-H. (Inventor) & Yeh, Y.-L. (Inventor), 19 May 2023, Patent No. WO2023083559A1, 14 Oct 2022
Research output: Patent › Patent publication

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2022
Apparatus and method for determining three dimensional data based on an image of a patterned substrate
Houben, T. (Inventor), Huisman, T. J. (Inventor), Pisarenco, M. (Inventor), Middlebrooks, S. A. (Inventor) & Batistakis, C. (Inventor), 23 Jun 2022, Patent No. WO2022128373A1, 24 Nov 2021
Research output: Patent › Patent publication

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