Projects per year
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Dive into the research topics where Thijs Janssen is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
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Collaborations and top research areas from the last five years
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Projects
- 1 Active
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TKI-HTSM/24.0176 - ASPEA: Atomic-Scale Processing Equipment for the Ångstrom Era
Mackus, A. J. M. (Project Manager), Macco, B. (Project member), Kessels, W. M. M. (Project member), Lam, C. H. X. (Project member), Vacancy PD (Project member), van Gurp, M. C. (Project member), Krieger, G. (Project member), Vacancy PHD (Project member), Janssen, T. (Project member) & Trevisan, A. (Project member)
1/01/24 → 31/12/29
Project: Third tier
Research output
- 2 Article
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Topographically selective atomic layer deposition within trenches enabled by an amorphous carbon inhibition layer
Janssen, T., Vossen, L. J. P., Verheijen, M. A., Kessels, W. M. M. & Mackus, A. J. M. (Corresponding author), 10 Feb 2025, In: Applied Physics Letters. 126, 6, 6 p., 063505.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile1 Citation (Scopus)47 Downloads (Pure) -
In situ formation of inhibitor species through catalytic surface reactions during area-selective atomic layer deposition of TaN
Merkx, M. J. M., Tezsevin, I., Yu, P., Janssen, T., Heinemans, R. H. G. M., Lengers, R. J., Chen, J. R., Jezewski, C. J., Clendenning, S. B., Kessels, W. M. M., Sandoval, T. E. (Corresponding author) & Mackus, A. J. M. (Corresponding author), 28 May 2024, In: Journal of Chemical Physics. 160, 20, 9 p., 204701.Research output: Contribution to journal › Article › Academic › peer-review
Open AccessFile8 Citations (Scopus)79 Downloads (Pure)
Datasets
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Supporting information
Merkx, M. J. M. (Creator), Tezsevin, I. (Creator), Yu, P. (Creator), Janssen, T. (Creator), Heinemans, R. H. G. M. (Creator), Lengers, R. J. (Creator), Chen, J.-R. (Creator), Jezewski, C. J. (Creator), Clendenning, S. B. (Creator), Kessels, W. M. M. (Creator), Sandoval, T. E. (Creator) & Mackus, A. J. M. (Creator), AIP Publishing, 22 May 2024
DOI: 10.60893/figshare.jcp.25743183, https://aip.figshare.com/articles/dataset/Supporting_information/25743183 and one more link, https://aip.figshare.com/articles/dataset/Supporting_information/25743183/1 (show fewer)
Dataset