• 147 Citations
20152020

Research output per year

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Student theses

Nucleation of muc-Si:H thin films on nano-imprint lithography textured substrates

Author: Faraz, T., 31 Aug 2014

Supervisor: Palmans, J. (Supervisor 1) & Creatore, M. (Supervisor 2)

Student thesis: Master

The use of substrate biasing during plasma-enhanced atomic layer deposition of TiN for area-selective deposition

Author: Vlaanderen, S., 2019

Supervisor: Faraz, T. (Supervisor 1), Merkx, M. J. (Supervisor 2) & Mackus, A. J. (Supervisor 2)

Student thesis: Master

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