• 147 Citations
20152020

Research output per year

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Research Output

  • 147 Citations
  • 11 Article
  • 1 Conference contribution
  • 1 Phd Thesis 1 (Research TU/e / Graduation TU/e)
2015

Atomic layer etching : what can we learn from atomic layer deposition?

Faraz, T., Roozeboom, F., Knoops, H. C. M. & Kessels, W. M. M., 2015, In : ECS Journal of Solid State Science and Technology. 4, 6, p. NS-023/032

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
54 Citations (Scopus)
396 Downloads (Pure)
2016

Nucleation of microcrystalline silicon : on the effect of the substrate surface nature and nano-imprint topography

Palmans, J., Faraz, T., Verheijen, M., Kessels, E. & Creatore, A., 7 Jan 2016, In : Journal of Physics D: Applied Physics. 49, 5, 11 p., 055205.

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)
7 Downloads (Pure)
2017

Atomic layer deposition of wet-etch resistant silicon nitride using di(sec-butylamino) silane and N2 plasma on planar and 3D substrate topographies

Faraz, T., van Drunen, M., Knoops, H. C. M., Mallikarjunan, A., Buchanan, I., Hausmann, D. M., Henri, J. & Kessels, W. M. M., 18 Jan 2017, In : ACS Applied Materials & Interfaces. 9, 2, p. 1858-1869 12 p.

Research output: Contribution to journalArticleAcademicpeer-review

21 Citations (Scopus)
7 Downloads (Pure)
2018

Controlling mechanical, structural, and optical properties of Al2O3 thin films deposited by plasma-enhanced atomic layer deposition with substrate biasing

Beladiya, V., Faraz, T., Kessels, W. M. M., Tünnermann, A. & Szeghalmi, A., 1 Jan 2018, Advances in Optical Thin Films VI. SPIE, 106910E. (Proceedings of SPIE; vol. 10691).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Downloads (Pure)

Low resistivity HfN: X grown by plasma-assisted ALD with external rf substrate biasing

Karwal, S., Verheijen, M. A., Williams, B. L., Faraz, T., Kessels, W. M. M. & Creatore, M., 21 Apr 2018, In : Journal of Materials Chemistry C. 6, 15, p. 3917-3926 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

11 Citations (Scopus)
7 Downloads (Pure)

Tuning material properties of oxides and nitrides by substrate biasing during plasma-enhanced atomic layer deposition on planar and 3D substrate topographies

Faraz, T., Knoops, H. C. M., Verheijen, M. A., Van Helvoirt, C. A. A., Karwal, S., Sharma, A., Beladiya, V., Szeghalmi, A., Hausmann, D. M., Henri, J., Creatore, M. & Kessels, W. M. M., 18 Apr 2018, In : ACS Applied Materials & Interfaces. 10, 15, p. 13158-13180 23 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
24 Citations (Scopus)
89 Downloads (Pure)
2019
16 Citations (Scopus)
3 Downloads (Pure)

Expanding the toolbox of atomic scale processing

Faraz, T., 14 Jun 2019, Eindhoven: Technische Universiteit Eindhoven. 283 p.

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

Open Access
File
444 Downloads (Pure)
Open Access
File
47 Downloads (Pure)

Status and prospects of plasma-assisted atomic layer deposition

Knoops, H., Faraz, T., Arts, K. & Kessels, E., 1 May 2019, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 37, 3, 26 p., 030902.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
17 Citations (Scopus)
226 Downloads (Pure)
2020

Effect of an electric field during the deposition of silicon dioxide thin films by plasma enhanced atomic layer deposition: an experimental and computational study

Beladiya, V., Becker, M., Faraz, T., Kessels, W. M. M., Schenk, P., Otto, F., Fritz, T., Gruenewald, M., Helbing, C., Jandt, K. D., Tünnermann, A., Sierka, M. & Szeghalmi, A., 21 Jan 2020, In : Nanoscale. 12, 3, p. 2089-2102 14 p.

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)
1 Downloads (Pure)
Open Access
File
1 Downloads (Pure)

Probing the origin and suppression of vertically oriented nanostructures of 2D WS2 layers

Balasubramanyam, S., Bloodgood, M., van Ommeren, M., Faraz, T., Vandalon, V., Kessels, W. M. M. E., Verheijen, M. A. & Bol, A. A., 22 Jan 2020, In : ACS Applied Materials & Interfaces. 12, 3, p. 3873-3885 13 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
11 Downloads (Pure)