• 130 Citations
20152020

Research output per year

If you made any changes in Pure these will be visible here soon.

Research Output

  • 130 Citations
  • 10 Article
  • 1 Conference contribution
  • 1 Phd Thesis 1 (Research TU/e / Graduation TU/e)
2020

Effect of an electric field during the deposition of silicon dioxide thin films by plasma enhanced atomic layer deposition: an experimental and computational study

Beladiya, V., Becker, M., Faraz, T., Kessels, W. M. M., Schenk, P., Otto, F., Fritz, T., Gruenewald, M., Helbing, C., Jandt, K. D., Tünnermann, A., Sierka, M. & Szeghalmi, A., 21 Jan 2020, In : Nanoscale. 12, 3, p. 2089-2102 14 p.

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)
1 Downloads (Pure)

Probing the origin and suppression of vertically oriented nanostructures of 2D WS2 layers

Balasubramanyam, S., Bloodgood, M., van Ommeren, M., Faraz, T., Vandalon, V., Kessels, W. M. M. E., Verheijen, M. A. & Bol, A. A., 22 Jan 2020, In : ACS Applied Materials & Interfaces. 12, 3, p. 3873-3885 13 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
7 Downloads (Pure)
2019
11 Citations (Scopus)
3 Downloads (Pure)

Expanding the toolbox of atomic scale processing

Faraz, T., 14 Jun 2019, Eindhoven: Technische Universiteit Eindhoven. 283 p.

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

Open Access
File
377 Downloads (Pure)
Open Access
File
45 Downloads (Pure)

Status and prospects of plasma-assisted atomic layer deposition

Knoops, H., Faraz, T., Arts, K. & Kessels, E., 1 May 2019, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 37, 3, 26 p., 030902.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
15 Citations (Scopus)
165 Downloads (Pure)
2018

Controlling mechanical, structural, and optical properties of Al2O3 thin films deposited by plasma-enhanced atomic layer deposition with substrate biasing

Beladiya, V., Faraz, T., Kessels, W. M. M., Tünnermann, A. & Szeghalmi, A., 1 Jan 2018, Advances in Optical Thin Films VI. SPIE, 106910E. (Proceedings of SPIE; vol. 10691).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Downloads (Pure)

Low resistivity HfN: X grown by plasma-assisted ALD with external rf substrate biasing

Karwal, S., Verheijen, M. A., Williams, B. L., Faraz, T., Kessels, W. M. M. & Creatore, M., 21 Apr 2018, In : Journal of Materials Chemistry C. 6, 15, p. 3917-3926 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

8 Citations (Scopus)
7 Downloads (Pure)

Tuning material properties of oxides and nitrides by substrate biasing during plasma-enhanced atomic layer deposition on planar and 3D substrate topographies

Faraz, T., Knoops, H. C. M., Verheijen, M. A., Van Helvoirt, C. A. A., Karwal, S., Sharma, A., Beladiya, V., Szeghalmi, A., Hausmann, D. M., Henri, J., Creatore, M. & Kessels, W. M. M., 18 Apr 2018, In : ACS Applied Materials & Interfaces. 10, 15, p. 13158-13180 23 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
20 Citations (Scopus)
85 Downloads (Pure)
2017

Atomic layer deposition of wet-etch resistant silicon nitride using di(sec-butylamino) silane and N2 plasma on planar and 3D substrate topographies

Faraz, T., van Drunen, M., Knoops, H. C. M., Mallikarjunan, A., Buchanan, I., Hausmann, D. M., Henri, J. & Kessels, W. M. M., 18 Jan 2017, In : ACS Applied Materials & Interfaces. 9, 2, p. 1858-1869 12 p.

Research output: Contribution to journalArticleAcademicpeer-review

19 Citations (Scopus)
7 Downloads (Pure)
2016

Nucleation of microcrystalline silicon : on the effect of the substrate surface nature and nano-imprint topography

Palmans, J., Faraz, T., Verheijen, M., Kessels, E. & Creatore, A., 7 Jan 2016, In : Journal of Physics D: Applied Physics. 49, 5, 11 p., 055205.

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)
7 Downloads (Pure)
2015

Atomic layer etching : what can we learn from atomic layer deposition?

Faraz, T., Roozeboom, F., Knoops, H. C. M. & Kessels, W. M. M., 2015, In : ECS Journal of Solid State Science and Technology. 4, 6, p. NS-023/032

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
53 Citations (Scopus)
392 Downloads (Pure)