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Research Output

Optimization of IR heater shapes for mirror temperature control in wafer scanners

Veldman, D. W. M., Nouwens, S. A. N., Fey, R. H. B., Zwart, H. J., van de Wal, M. M. J., van den Boom, J. D. B. J. & Nijmeijer, H., 22 Oct 2019.

Research output: Contribution to conferencePosterAcademic

Open Access
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