• 424 Citations
20012017
If you made any changes in Pure these will be visible here soon.

Fingerprint Fingerprint is based on mining the text of the person's scientific documents to create an index of weighted terms, which defines the key subjects of each individual researcher.

  • 3 Similar Profiles
Atomic layer deposition Chemical Compounds
Plasmas Engineering & Materials Science
amorphous silicon Physics & Astronomy
Mass spectrometry Chemical Compounds
atomic layer epitaxy Physics & Astronomy
mass spectroscopy Physics & Astronomy
Carbon Monoxide Chemical Compounds
Ionization Chemical Compounds

Network Recent external collaboration on country level. Dive into details by clicking on the dots.

Research Output 2001 2017

  • 424 Citations
  • 20 Article
  • 2 Conference contribution
3 Citations

Surface phenomena during plasma-assisted atomic layer etching of SiO2

Gasvoda, R. J., van de Steeg, A. W., Bhowmick, R., Hudson, E. A. & Agarwal, S., 13 Sep 2017, In : ACS Applied Materials & Interfaces. 9, 36, p. 31067-31075 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

Surface phenomena
Etching
Plasmas
Ellipsometry
Fluorocarbons
1 Citations

Single-step non-thermal plasma synthesis of 3C-SiC nanoparticles

Chaukulkar, R. P., de Peuter, K., Ghodes, J. A., Pylypenko, S., Cloud, J. E., Yang, Y., Stradins, P. & Agarwal, S., Jan 2015, In : Materials Research Express. 2, 1, 9 p., 015019

Research output: Contribution to journalArticleAcademicpeer-review

5 Citations

Low temperature hydrogen plasma-assisted atomic layer deposition of copper studied using in situ infrared reflection absorption spectroscopy

Chaukulkar, R. P., Thissen, N. F. W., Rai, V. R. & Agarwal, S., 1 Jan 2014, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 32, 1, 9 p., 01A108

Research output: Contribution to journalArticleAcademicpeer-review

Atomic layer deposition
infrared reflection
hydrogen plasma
cold plasmas
atomic layer epitaxy
5 Citations

Nucleation of silicon nanocrystals in a remote plasma without subsequent coagulation

Dogan, I., Weeks, S. L., Agarwal, S. & Sanden, van de, M. C. M., 2014, In : Journal of Applied Physics. 115, p. 244301-1/9 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
coagulation
nanocrystals
nucleation
silicon
stagnation pressure
11 Citations

Single-step plasma synthesis of carbon-coated silicon nanoparticles

Chaukulkar, R. P., Peuter, K. D., Stradins, P., Pylypenko, S., Bell, J. P., Yang, Y. & Agarwal, S., 1 Jan 2014, In : ACS Applied Materials and Interfaces. 6, 21, p. 19026-19034 9 p.

Research output: Contribution to journalArticleAcademicpeer-review

Silicon
Carbon
Nanoparticles
Plasmas
Crystalline materials

Press / Media

MINES FACULTY HONORED FOR RESEARCH, TEACHING, MENTORSHIP

Sumit Agarwal

26/04/18

1 item of media coverage

Press/Media: Expert Comment

Extreme Engineering

Sumit Agarwal

2/08/17

1 item of media coverage

Press/Media: Expert Comment

TWO MINES PROFESSORS RECEIVE SUNSHOT GRANTS

Sumit Agarwal

27/07/17

1 item of media coverage

Press/Media: Expert Comment

ECONOMY AND INEQUALITY

Sumit Agarwal

17/09/14

1 item of media coverage

Press/Media: Expert Comment

Student theses

Silicon nanocrystals for solar cell applications: production and characterization of sillicon nanocrystals

Author: Kramer, N., 31 Aug 2010

Supervisor: Dogan, I. (Supervisor 1), Agarwal, S. (Supervisor 2) & van de Sanden, M. (Supervisor 2)

Student thesis: Master

File