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Fingerprint Dive into the research topics where Saurabh Karwal is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

  • 12 Similar Profiles
Atomic layer deposition Engineering & Materials Science
Plasmas Engineering & Materials Science
atomic layer epitaxy Physics & Astronomy
Thickness control Engineering & Materials Science
Materials properties Engineering & Materials Science
Nanopores Engineering & Materials Science
Substrates Engineering & Materials Science
Ultrathin films Engineering & Materials Science

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Research Output 2010 2019

  • 98 Citations
  • 8 Article
10 Citations (Scopus)
3 Downloads (Pure)
atomic layer epitaxy
ions
energy
dosage
energy distribution
8 Citations (Scopus)
7 Downloads (Pure)

Low resistivity HfN: X grown by plasma-assisted ALD with external rf substrate biasing

Karwal, S., Verheijen, M. A., Williams, B. L., Faraz, T., Kessels, W. M. M. & Creatore, M., 12 Mar 2018, In : Journal of Materials Chemistry C. 6, 15, p. 3917-3926 10 p.

Research output: Contribution to journalArticleAcademicpeer-review

Atomic layer deposition
Plasmas
Substrates
Grain boundaries
Scattering
12 Citations (Scopus)
395 Downloads (Pure)

Low-temperature plasma-assisted atomic-layer-deposited SnO2 as an electron transport layer in planar Perovskite solar cells

Kuang, Y., Zardetto, V., van Gils, R. J., Karwal, S., Koushik, D., Verheijen, M. A., Black, L. E., Weijtens, C. H. L., Veenstra, S. C., Andriessen, H. A. J. M. R., Kessels, W. M. M. & Creatore, M., 1 Oct 2018, In : ACS Applied Materials & Interfaces. 10, 36, p. 30367-30378

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Conduction bands
Conversion efficiency
Ultraviolet photoelectron spectroscopy
Plasmas
Open circuit voltage
23 Citations (Scopus)

Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS2: Large area, thickness control and tuneable morphology

Sharma, A., Verheijen, M. A., Wu, L., Karwal, S., Vandalon, V., Knoops, H. C. M., Sundaram, R. S., Hofmann, J. P., Kessels, W. M. M. & Bol, A. A., 14 May 2018, In : Nanoscale. 10, 18, p. 8615-8627 13 p.

Research output: Contribution to journalArticleAcademicpeer-review

Thickness control
Atomic layer deposition
Plasmas
Monolayers
Temperature
1 Citation (Scopus)
42 Downloads (Pure)

Tailoring nanopore formation in atomic layer deposited ultrathin films

Karwal, S., Li, T., Yanguas-Gil, A., Canlas, C. P., Lei, Y., Mane, A. U., Libera, J. A., Seifert, S., Winans, R. E. & Elam, J. W., 1 Jan 2018, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films. 36, 1, 7 p., 01A103.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Nanopores
Atomic layer deposition
Ultrathin films
atomic layer epitaxy
Catalyst selectivity