• 0 Citations

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Personal profile

Education and Teaching

  • 4GC10 Mechanical Design project
  • 4CC00 Mechatronic Design

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Research Output

  • 1 Conference contribution

Conformal slip-free wafer chucking using an actuated wafer table

Hermanussen, S. J., Habets, M. B. I., Heertjes, M. F. & Vermeulen, J. P. M. B., 10 Feb 2020, 2019 7th International Conference on Control, Mechatronics and Automation (ICCMA). Piscataway: Institute of Electrical and Electronics Engineers, p. 278-282 5 p. 8988610

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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