• 312 Citations
20112019
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Research Output 2011 2019

1 Citation (Scopus)

Energy distribution functions for ions from pulsed EUV-induced plasmas in low pressure N2-diluted H2 gas

Beckers, J., van de Ven, T., de Meijere, C. A., van der Horst, R., van Kampen, M. & Banine, V., 2 Apr 2019, In : Applied Physics Letters. 114, 5 p., 133502

Research output: Contribution to journalArticleAcademicpeer-review

energy distribution
low pressure
distribution functions
gases
ions

EUV-induced plasma: a peculiar phenomenon of a modern lithographic technology

Beckers, J., van de Ven, T., van der Horst, R., Astakhov, D. . I. & Banine, V., 2 Jul 2019, In : Applied Sciences. 9, 14, 23 p., 2827

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Plasmas
Lithography
lithography
boom
Extreme ultraviolet lithography
3 Citations (Scopus)

Analysis of retarding field energy analyzer transmission by simulation of ion trajectories

van de Ven, T. H. M., de Meijere, C. A., van der Horst, R. M., van Kampen, M., Banine, V. Y. & Beckers, J., 1 Apr 2018, In : Review of Scientific Instruments. 89, 4, 11 p., 043501

Research output: Contribution to journalArticleAcademicpeer-review

analyzers
Trajectories
retarding
trajectories
Ions
6 Citations (Scopus)

Ion energy distributions in highly transient EUV induced plasma in hydrogen

van de Ven, T. H. M., Reefman, P., de Meijere, C. A., van der Horst, R. M., van Kampen, M., Banine, V. Y. & Beckers, J., 14 Feb 2018, In : Journal of Applied Physics. 123, 6, p. 1-6 063301

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
13 Citations (Scopus)

Exploring the electron density in plasma induced by EUV radiation: I. Experimental study in hydrogen

Van Der Horst, R. M., Beckers, J., Osorio, E. A., Astakhov, D. I., Goedheer, W. J., Lee, C. J., Ivanov, V. V., Krivtsum, V. M., Koshelev, K. N., Lopaev, D. V., Bijkerk, F. & Banine, V. Y., 10 Mar 2016, In : Journal of Physics D: Applied Physics. 49, 14, p. 1-9 145203

Research output: Contribution to journalArticleAcademicpeer-review

Carrier concentration
Hydrogen
Plasmas
Radiation
hydrogen

Student theses

Nanosecond pulsed discharges in N2 and N2/H2O mixtures

Author: van der Horst, R., 31 Aug 2011

Supervisor: Verreycken, T. (Supervisor 1) & Bruggeman, P. (Supervisor 2)

Student thesis: Master

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