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Personal profile

Biography

Ruben Merks was born in Eindhoven (The Netherlands) on June 26th, 1990. He received both his bachelor degree (2013) and master degree (2015) in Electrical Engineering at Eindhoven University of Technology (TU/e).

He finished his master thesis on the subject “Thermal control for projection optics in extreme ultraviolet lithography” with a final grade of 10. The project, which was supervised by prof. dr. W.M.J.M. Coene and prof. dr. S. Weiland, was a collaboration between ASML and the Control Systems group in the department of Electrical Engineering.

As of May 2015, he is working as a Ph. D. student at the Control Systems group in the department of Electrical Engineering under supervision of prof. S. Weiland. His research is on the subject “Thermal modeling and estimator design for immersion lithographic systems”, which also is collaboration between ASML and the Control Systems group in the department of Electrical Engineering.

Fingerprint Fingerprint is based on mining the text of the person's scientific documents to create an index of weighted terms, which defines the key subjects of each individual researcher.

Observability Engineering & Materials Science
Controllability Engineering & Materials Science
adaptive optics Physics & Astronomy
lithography Physics & Astronomy
irradiance Physics & Astronomy
Data structures Engineering & Materials Science
Large scale systems Engineering & Materials Science
aberration Physics & Astronomy

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Research Output 2015 2019

  • 3 Citations
  • 4 Other
  • 3 Conference contribution
  • 1 Article

Constrained order observer design for disturbance decoupled output estimation

Merks, R. W. H., Kivits, E. M. M. & Weiland, S., Jan 2019, In : IEEE Control Systems Letters. 3, 1, p. 49-54 6 p.

Research output: Contribution to journalArticleAcademicpeer-review

Open Access
File
Large scale systems
Error analysis
Controllers
Industry

Reduced order controller design for disturbance decoupling problems

Merks, R. W. H. & Weiland, S., 2018 1 p.

Research output: Contribution to conferenceOtherOther research output

File
Controllers
Finite volume method
Partial differential equations
Industry

Measures of controllability and observability for large-scale systems

Merks, R. W. H. & Weiland, S., 2017 1 p.

Research output: Contribution to conferenceOtherOther research output

Open Access
File
Observability
Controllability
Large scale systems
Finite volume method
State estimation

Thermal control in wafer scanners using high complexity models

Merks, R. W. H., Habets, M. B. I. & Weiland, S., 2016 1 p.

Research output: Contribution to conferenceOtherOther research output

File
Real time control
Throughput
Bandwidth
Hot Temperature
Industry
2 Citations

A multiphysics modeling approach for thermal aberration prediction and control in extreme ultraviolet lithography

Habets, M., Merks, R. W. H., Weiland, S. & Coene, W., 2015, Imaging and Applied Optics 2015. Washington, D.C.: Optical Society of America (OSA), 3 p. AOM4B.2. (OSA Technical Digest)

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Student theses

Control relevant model reduction for disturbance decoupling

Author: Kivits, E., 23 Feb 2017

Supervisor: Weiland, S. (Supervisor 1) & Merks, R. (Supervisor 2)

Student thesis: Master

Parameter identification and state estimation of Li-ion and NiMH batteries

Author: Merks, R., 2012

Supervisor: Kessels, J. (Supervisor 1) & Hendrix, W. (Supervisor 1)

Student thesis: Bachelor