• 2
    Citations - based on content available in repository [source: Scopus]
20182024

Content available in repository

Filter
Patent publication

Search results

  • 2023

    Lithographic apparatus stage coupling

    de Goeij, J. (Inventor), de Bruijn, R. (Inventor), Vermeulen, J. P. M. B. (Inventor), Leenaars, R. (Inventor) & Jansen, B. (Inventor), 11 May 2023, Patent No. WO2023078788, Priority date 11 May 2023

    Research output: PatentPatent publication

    Open Access
    File
    201 Downloads (Pure)
  • 2021

    Pellicle Frame for EUV Lithography

    Custers, K. (Inventor), de Bruijn, R. G. C. (Inventor), Kruizinga, M. (Inventor) & Schijvenaars, L. A. (Inventor), 28 Oct 2021, IPC No. GF03F 1/64 (3012.01), Patent No. WO2021213777A1, 25 Mar 2021, Priority date 23 Apr 2020, Priority No. EP20200170977 20200423

    Research output: PatentPatent publication

    Open Access
    File
    37 Downloads (Pure)